OTP memory cell and fabricating method thereof
View Patent ↗A one-time programmable (OTP) memory cell is provided, which includes: a well of a first conductivity type; a gate insulating layer formed on the well and including first and second fuse regions; a gate electrode of a second conductivity type formed on the gate insulating layer, the second conductivity type being opposite in electric charge to the first conductivity type; a junction region of the second conductivity type formed in the well and arranged to surround the first and second fuse regions; and an isolation layer formed in the well between the first fuse region and the second fuse region.
1. A method for forming a one-time programmable (OTP) memory cell, the method comprising:
forming an isolation layer in a first conductivity type well;
forming a gate insulating layer and a gate electrode on the well,
wherein the gate insulating layer comprises a capacitor region, a first fuse projection region, and a second fuse projection region; and
exposing an upper portion of the well to ions of a second conductivity type to form a junction region that surrounds the first fuse projection region and the second fuse projection region,
wherein the isolation layer is formed in the well between the first fuse projection region and the second fuse projection region.
2. The method of claim 1 , wherein the forming of the isolation layer comprises forming a trench in the well and filling the trench with silicon oxide.
3. The method of claim 1 , wherein the capacitor region has a greater thickness than the first fuse projection region and the second fuse projection region, and the difference in thickness of the capacitor region and the first and second fuse projection regions is obtained by depositing a gate insulating layer material of a predetermined thickness on the well and then etching the first and second fuse projection regions.
4. The method of claim 1 , wherein the gate electrode is doped with ions of the second conductivity type when the junction region is formed by exposing the well to the ions of the second conductivity type.
5. The method of claim 1 , further comprising forming a well tap of a first conductivity type in the well, the concentration of ions of the first conductivity type being higher in the well tap than in the well.