Semiconductor device
View Patent ↗A semiconductor device includes a first electrode, a first insulating layer having a first opening reaching the first electrode and having a ring-shaped first side wall exposed to the first opening, an oxide semiconductor layer on the first side wall, the oxide semiconductor layer being connected with the first electrode, a gate insulating layer on the oxide semiconductor layer, the oxide semiconductor layer being between the first side wall and the gate insulating layer, a gate electrode facing the oxide semiconductor layer on the first side wall, the gate insulating layer being between the oxide semiconductor layer and the gate electrode, and a second electrode above the first insulating layer, the second electrode being connected with the oxide semiconductor layer.
1. A semiconductor device, comprising:
a first electrode;
a first insulating layer having a first opening reaching the first electrode and having a ring-shaped first side wall exposed to the first opening;
an oxide semiconductor layer on the first side wall, the oxide semiconductor layer being connected with the first electrode;
a gate insulating layer on the oxide semiconductor layer, the oxide semiconductor layer being between the first side wall and the gate insulating layer;
a gate electrode facing the oxide semiconductor layer on the first side wall, the gate insulating layer being between the oxide semiconductor layer and the gate electrode; and
a second electrode above the first insulating layer, the second electrode being connected with the oxide semiconductor layer;
further comprising: a second insulating layer above the first electrode, the first insulating layer, the oxide semiconductor layer and the gate insulating layer;
a fourth electrode connected with the first electrode; and
a fifth electrode connected with the gate electrode;
wherein: the fourth electrode is connected with the first electrode via a second opening in the second insulating layer;
the second electrode is connected with the oxide semiconductor layer via a third opening in the second insulating layer; and
the fifth electrode is connected with the gate electrode via a fourth opening in the second insulating layer.
2. The semiconductor device according to claim 1 , wherein the first side wall is tapered.
3. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer covers the first side wall.
4. The semiconductor device according to claim 1 , further comprising a third electrode between the first insulating layer and the oxide semiconductor layer above the first insulating layer.
5. The semiconductor device according to claim 4 , wherein the second electrode is connected with the oxide semiconductor layer on a side opposite to the third electrode.
6. The semiconductor device according to claim 4 , wherein the second electrode is connected with the oxide semiconductor layer via the third electrode.
7. The semiconductor device according to claim 1 , wherein the fourth electrode is connected with the first electrode via the second opening and a fifth opening in the first insulating layer.
8. The semiconductor device according to claim 1 , wherein:
a plurality of the first openings are located adjacent to each other; and
the first electrode, the second electrode and the gate electrode are common to the plurality of first openings.
9. The semiconductor device according to claim 1 , further comprising a ring-shaped third insulating layer surrounding the first insulating layer;
wherein:
the first insulating layer and the third insulating layer have a second side wall located to surround the first side wall; and
the gate electrode is located to face the first side wall and the second side wall.
10. A semiconductor device, comprising:
a first insulating layer having a ring-shaped first side wall;
an oxide semiconductor layer on the first side wall;
a gate insulating layer on the oxide semiconductor layer, the oxide semiconductor layer being between the first side wall and the gate insulating layer;
a gate electrode facing the oxide semiconductor layer on the first side wall, the gate insulating layer being between the oxide semiconductor layer and the gate electrode;
a first electrode below the first insulating layer, the first electrode being connected with a first portion of the oxide semiconductor layer; and
a second electrode above the first insulating layer, the second electrode being connected with a second portion of the oxide semiconductor layer;
further comprising: a second insulating layer above the gate electrode;
a fourth electrode connected with the first electrode; and
a fifth electrode connected with the gate electrode;
wherein: the fourth electrode is connected with the first electrode via a second opening in the second insulating layer;
the second electrode is connected with the oxide semiconductor layer via a third opening in the second insulating layer; and
the fifth electrode is connected with the gate electrode via a fourth opening in the second insulating layer.
11. The semiconductor device according to claim 10 , wherein the first side wall is tapered.
12. The semiconductor device according to claim 10 , wherein the oxide semiconductor layer covers the first side wall.
13. The semiconductor device according to claim 10 , further comprising a third electrode between the first insulating layer and the oxide semiconductor layer above the first insulating layer.
14. The semiconductor device according to claim 13 , wherein the second electrode is connected with the oxide semiconductor layer on a side opposite to the third electrode.
15. The semiconductor device according to claim 13 , wherein the second electrode is connected with the oxide semiconductor layer via the third electrode.
16. The semiconductor device according to claim 10 , wherein the fourth electrode is connected with the first electrode via the second opening and a fifth opening in the first insulating layer.
17. The semiconductor device according to claim 10 , wherein:
a plurality of the first side walls are located adjacent to each other; and
the first electrode, the second electrode and the gate electrode are common to the plurality of first side walls.
18. The semiconductor device according to claim 10 , further comprising a ring-shaped third insulating layer surrounding the first insulating layer;
wherein:
the first insulating layer and the third insulating layer have a second side wall located to surround the first side wall; and
the gate electrode is located to face the first side wall and the second side wall.