Laser light source
View Patent ↗A laser light source, comprising a semiconductor layer sequence on a substrate and having an active region and a radiation coupling out area having first and second partial regions and a filter structure. The active region generates coherent first electromagnetic radiation and incoherent second electromagnetic radiation, the coherent first electromagnetic radiation is emitted by the first partial region along an emission direction, the incoherent second electromagnetic radiation is emitted by the first partial region and by the second partial region. The filter structure at least partly attenuates the incoherent second electromagnetic radiation emitted by the active region along the emission direction. The filter structure has at least one filter element arranged on an area of the semiconductor layer sequence which has an extension direction parallel to the emission direction and which is remote from the substrate.
1. A laser light source, comprising:
a semiconductor layer sequence on a substrate, the semiconductor layer sequence having an active region and a radiation coupling out area having a first partial region and a second partial region different than the first partial region, and
a filter structure,
wherein
the active region generates, during operation, coherent first electromagnetic radiation having a first wavelength range and incoherent second electromagnetic radiation having a second wavelength range,
the coherent first electromagnetic radiation is emitted by the first partial region along an emission direction,
the incoherent second electromagnetic radiation is emitted by the first partial region and by the second partial region,
the second wavelength range comprises the first wavelength range,
the filter structure at least partly attenuates the incoherent second electromagnetic radiation emitted by the active region along the emission direction,
the filter structure has at least one filter element arranged on an area of the semiconductor layer sequence which has an extension direction parallel to the emission direction and which is remote from the substrate,
the at least one filter element comprises a surface structure comprising at least one depression which is embodied as at least one trench.
2. The laser light source as claimed in claim 1 , wherein
the semiconductor layer sequence has a growth direction,
the surface having the surface structure is arranged perpendicularly to the growth direction, and
the surface structure is arranged in a manner laterally offset with respect to the active region.
3. The laser light source as claimed in claim 1 , wherein
the trench has an extension direction, and
the extension direction forms an angle of greater than or equal to 0° and less than or equal to 90° with the emission direction.
4. The laser light source as claimed in claim 1 , wherein
the trench has an extension direction, and
the extension direction forms an angle of greater than or equal to 30° and less than or equal to 60° with the emission direction.
5. The laser light source as claimed in claim 1 , wherein
the trench has an extension direction, and
the extension direction forms an angle of 45° with the emission direction.
6. The laser light source as claimed in claim 1 , wherein the trench approaches the active region in the direction of the emission direction.
7. The laser light source as claimed in claim 1 , wherein the trench has a depth such that the trench extends into the semiconductor layer sequence as far as a distance of less than or equal to 200 nm above a waveguide layer of the semiconductor layer sequence.
8. The laser light source as claimed in claim 1 , wherein the trench has a depth such that the trench extends right into a waveguide layer of the semiconductor layer sequence.
9. The laser light source as claimed in claim 1 , wherein the trench extends right into the substrate.
10. The laser light source as claimed in claim 1 , wherein the trench has a cross section having side areas parallel to a growth direction of the semiconductor layer sequence.
11. The laser light source as claimed in claim 1 , wherein the trench has a cross section having side areas beveled up to an angle of 45° with respect to a growth direction of the semiconductor layer sequence.
12. The laser light source as claimed in claim 1 , wherein the trench has a U-shaped or V-shaped cross section.
13. The laser light source as claimed in claim 1 , wherein the at least one filter element comprises a plurality of trenches.
14. The laser light source as claimed in claim 13 , wherein the trenches are arranged alongside one another in a manner running parallel to one another.
15. The laser light source as claimed in claim 13 , wherein the trenches have a distance to each other of less than or equal to an average wavelength of the first and/or second wavelength range.
16. The laser light source as claimed in claim 15 , wherein the trenches have a distance to each other of approximately one quarter of the average wavelength of the first and/or second wavelength range.
17. The laser light source as claimed in claim 1 , wherein the at least one trench is embodied as at least two trenches, which are arranged, in a lateral direction, at different sides of a ridge structure of the semiconductor layer sequence.
18. The laser light source as claimed in claim 17 , wherein the trenches have a distance of less than 4 μm from the ridge structure.
19. The laser light source as claimed in claim 1 , wherein the surface structure is at least partly covered with a non-transparent material.