Solid-state imaging device, manufacturing method thereof, and camera with arranged pixel combinations alternatively
A solid-state imaging device includes a semiconductor substrate; and a pixel unit having a plurality of pixels on the semiconductor substrate, wherein the pixel unit includes first pixel groups having two or more pixels and second pixel groups being different from the first pixel groups, wherein a portion of the pixels in the first pixel groups and a portion of the pixels in the second pixel groups share a floating diffusion element.
1. An imaging device, comprising:
a pixel array including a plurality of sub-arrays, respective ones of the plurality of sub-arrays including four pixels arranged in a 2×2 matrix, respective ones of the pixels including a photodiode and a transfer transistor, and
a plurality of on-chip lenses, wherein
each pixel of a first sub-array of the plurality of sub-arrays and a second sub-array of the plurality of sub-arrays includes a green-light-transmitting filter,
each pixel of a third sub-array of the plurality of sub-arrays includes a blue-light-transmitting filter,
each pixel of a fourth sub-array of the plurality of sub-arrays includes a red-light-transmitting filter,
the first sub-array is disposed diagonally to the second sub-array,
the third sub-array is disposed diagonally to the fourth sub-array, and
each of the plurality of on-chip lenses is disposed corresponding to the four pixels in a different one of the first, second and third sub-arrays.
2. The imaging device according to claim 1 , wherein four pixels of the pixel array share a floating diffusion element.
3. The imaging device according to claim 1 , further comprising a plurality of optical waveguides, wherein a respective optical waveguide is disposed between the respective on-chip lens and the corresponding sub-array.
4. The imaging device according to claim 3 , wherein a respective optical waveguide corresponding to the first sub-array, a respective optical waveguide corresponding to the second sub-array, a respective optical waveguide corresponding to the third sub-array, and a respective optical waveguide corresponding to the fourth sub array have a same opening size as one another.
5. The imaging device according to claim 1 , wherein a respective on-chip lens corresponding to the first sub-array, a respective on-chip lens corresponding to the second sub-array, a respective on-chip lens corresponding to the third sub-array, and a respective on-chip lens corresponding to the fourth sub array have a same diameter as one another.
6. The imaging device according to claim 1 , further comprising a conductive layer disposed between the first sub-array and the second sub-array.
7. The imaging device according to claim 1 , wherein four pixels of the pixel array share an amplification transistor and a reset transistor.
8. The imaging device according to claim 1 , wherein the four pixels of the first, second, third and fourth sub-arrays are separated by a first insulating material.
9. The imaging device according to claim 8 , wherein each of the first, second, third and fourth sub-arrays has only four pixels separated by the first insulating material.
10. The imaging device according to claim 1 , wherein the green-light-transmitting filter comprises a single filter disposed corresponding to the four pixels of the first sub-array.
11. The imaging device according to claim 1 , wherein
each of the plurality of optical waveguides comprises a second insulating material, and
the second insulating material comprises silicon oxide, silicon nitride, silicon carbide, or a combination thereof.
12. An imaging system, comprising:
an imaging device, including:
a pixel array including a plurality of sub-arrays, respective ones of the plurality of sub-arrays including four pixels arranged in a 2×2 matrix, respective ones of the pixels including a photodiode and a transfer transistor, and
a plurality of on-chip lenses, wherein
each pixel of a first sub-array of the plurality of sub-arrays and a second sub-array of the plurality of sub-arrays includes a green-light-transmitting filter,
each pixel of a third sub-array of the plurality of sub-arrays includes a blue-light-transmitting filter,
each pixel of a fourth sub-array of the plurality of sub-arrays includes a red-light-transmitting filter,
the first sub-array is disposed diagonally to the second sub-array,
the third sub-array is disposed diagonally to the fourth sub-array, and
each of the plurality of on-chip lenses is disposed corresponding to the four pixels in a different one of the first, second and third sub-arrays.
13. The imaging system according to claim 12 , wherein four pixels of the pixel array share a floating diffusion element.
14. The imaging system according to claim 12 , further comprising a plurality of optical waveguides, wherein a respective optical waveguide is disposed between the respective on-chip lens and the corresponding sub-array.
15. The imaging system according to claim 14 , wherein a respective optical waveguide corresponding to the first sub-array, a respective optical waveguide corresponding to the second sub-array, a respective optical waveguide corresponding to the third sub-array, and a respective optical waveguide corresponding to the fourth sub array have a same opening size as one another.
16. The imaging system according to claim 12 , wherein a respective on-chip lens corresponding to the first sub-array, a respective on-chip lens corresponding to the second sub-array, a respective on-chip lens corresponding to the third sub-array, and a respective on-chip lens corresponding to the fourth sub array have a same diameter as one another.
17. The imaging system according to claim 12 , further comprising a conductive layer disposed between the first sub-array and the second sub-array.
18. The imaging system according to claim 12 , wherein four pixels of the pixel array share an amplification transistor and a reset transistor.
19. The imaging system according to claim 12 , further comprising an optical system configured to form an image on an imaging surface of the imaging device.
20. The imaging system according to claim 12 , further comprising a signal processing circuit configured to process an output signal of the imaging device and output a video signal.