Method for integrating a light emitting device
Light emitting devices and methods of integrating micro LED devices into light emitting device are described. In an embodiment a light emitting device includes a reflective bank structure within a bank layer, and a conductive line atop the bank layer and elevated above the reflective bank structure. A micro LED device is within the reflective bank structure and a passivation layer is over the bank layer and laterally around the micro LED device within the reflective bank structure. A portion of the micro LED device and a conductive line atop the bank layer protrude above a top surface of the passivation layer.
1. A light emitting device comprising:
a substrate;
a bank layer on the substrate;
an array of bank openings in the bank layer;
an electrically conductive dam structure raised above the bank layer;
a corresponding array of micro LED devices within the array of bank openings; and
a passivation layer that spans directly over the bank layer and within the bank openings such that portions of the passivation layer within the array of bank openings are laterally around the corresponding array of micro LED devices, and wherein a portion of the each of the micro LED devices and the electrically conductive dam structure protrude above a top surface of the passivation layer.
2. The light emitting device of claim 1 , wherein the electrically conductive dam structure comprises a ground tie line.
3. The light emitting device of claim 2 , wherein the ground tie line is 1 μm-5 μm thick.
4. The light emitting device of claim 3 , wherein the ground tie line comprises aluminum.
5. The light emitting device of claim 1 , wherein the electrically conductive dam structure runs between rows of the bank openings.
6. The light emitting device of claim 5 , wherein the electrically conductive dam structure runs between columns of the bank openings.
7. The light emitting device of claim 1 , further comprising a corresponding array of electrically conductive bank structure layers within the array of bank openings, wherein the corresponding array of micro LED devices is bonded to the corresponding array of electrically conductive bank structure layers.
8. The light emitting device of claim 7 , wherein the electrically conductive bank structure layers are 1 μm or less thick.
9. The light emitting device of claim 1 , wherein the passivation layer comprises a thermoset material.
10. The light emitting device of claim 9 , wherein the thermoset material is an acrylic.
11. The light emitting device of claim 1 , wherein the substrate is a thin film transistor substrate.
12. The light emitting device of claim 1 , wherein the electrically conductive dam structure comprises a dam layer and a ground tie line on the dam layer.
13. The light emitting device of claim 12 , wherein the dam layer and the bank layer are formed of the same material.
14. The light emitting device of claim 1 , wherein the electrically conductive dam structure comprises a dam layer and a via contact on the dam layer.