IP Library Granted Patent US 9,548,464
Granted Patent B2
US 9,548,464 · App. 14/985,231 · Granted Jan 17, 2017

N-type thin film transistor

Inventors: Guan-Hong Li (Beijing, CN); Qun-Qing Li (Beijing, CN); Yuan-Hao Jin (Beijing, CN); Shou-Shan Fan (Beijing, CN)
Assignees: Tsinghua University; HON HAI PRECISION INDUSTRY CO., LTD.
H01L51/0541H01L51/0048H01L51/0096H01L51/0525H01L51/0558
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Quick Facts
Patent No.
US 9,548,464
App. No.
14/985,231
Granted
Jan 17, 2017
Kind
B2
Abstract

An N-type semiconductor layer includes an insulating substrate, an MgO layer, a semiconductor carbon nanotube layer, a functional dielectric layer, a source electrode, a drain electrode, and a gate electrode. The semiconductor carbon nanotube layer is sandwiched between the MgO layer and the functional dielectric layer. The source electrode and the drain electrode electrically connect the semiconductor carbon nanotube layer. The gate electrode is on the functional dielectric layer and insulated from the semiconductor carbon nanotube layer.

Claims (18)

1. An N-type thin film transistor, comprising:

an insulating substrate;

an MgO layer on the insulating substrate;

a semiconductor carbon nanotube layer on the MgO layer, wherein the semiconductor carbon nanotube layer comprises a first surface and a second surface opposite to the first surface, and the first surface is in direct contact with the MgO layer;

a functional dielectric layer on the second surface;

a source electrode and a drain electrode electrically connected to the semiconductor carbon nanotube layer, wherein the source electrode and the drain electrode are spaced from each other; and

a gate electrode on the functional dielectric layer, wherein the gate electrode is insulated from the semiconductor carbon nanotube layer.

2. The N-type thin film transistor of claim 1 , wherein the semiconductor carbon nanotube layer is sandwiched between the MgO layer and the functional dielectric layer.

3. The N-type thin film transistor of claim 2 , wherein the MgO layer entirely covers the first surface, and the functional dielectric layer entirely cover the second surface.

4. The N-type thin film transistor of claim 3 , wherein the semiconductor carbon nanotube layer is sealed by the MgO layer and the functional dielectric layer.

5. The N-type thin film transistor of claim 1 , wherein a thickness of the MgO layer ranges from about 1 nanometer to about 10 nanometers.

6. The N-type thin film transistor of claim 1 , wherein the semiconductor carbon nanotube layer comprises a plurality of carbon nanotubes.

7. The N-type thin film transistor of claim 1 , wherein the semiconductor carbon nanotube layer comprises a plurality of semi-conductive carbon nanotubes connected with each other to form a conductive network.

8. The N-type thin film transistor of claim 7 , wherein a percentage of the plurality of semi-conductive carbon nanotubes in the semiconductor carbon nanotube layer is greater than or equal to 66.7%.

9. The N-type thin film transistor of claim 1 , wherein the semiconductor carbon nanotube layer consists of a plurality of semi-conductive carbon nanotubes.

10. The N-type thin film transistor of claim 1 , wherein a thickness of the semiconductor carbon nanotube layer ranges from about 0.5 nanometers to about 2 nanometers.

11. The N-type thin film transistor of claim 1 , wherein a thickness of the functional dielectric layer ranges from about 20 nanometers to about 40 nanometers.

12. The N-type thin film transistor of claim 1 , wherein a material of the functional dielectric layer is selected from the group consisting of aluminum oxide, hafnium oxide, and yttrium oxide.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 30, 2015
From: LI, GUAN-HONG; LI, QUN-QING; JIN, YUAN-HAO; FAN, SHOU-SHAN
To: TSINGHUA UNIVERSITY; HON HAI PRECISION INDUSTRY CO., LTD.
Reel/Frame 037387/0726 →
Priority Claims (1)
CN 2014 1 0848088 · Dec 31, 2014 · national
Continuity (1)
Related Publication 20160190492A1 · Jun 30, 2016