Methods and apparatus for packaging a MEMS device
Systems and methods for packaging a MEMS device are provided. Embodiments herein avoid the use of a metal housing enclosing the MEMS device or die pad of the MEMS device. Instead, a metal port is mounted directly to the MEMS device using a ceramic carrier. In preferred embodiments, the ceramic carrier is soldered, brazed, welded or eutectic bonded to the metal port.
1. A MEMS system comprising:
a MEMS device including a front side and a backside;
a ceramic substrate with an opening that traverses the ceramic substrate wherein the backside of the MEMS device is hermetically sealed to a first side of the ceramic substrate around the opening; and,
a metal port aligned with the opening and hermetically sealed to the ceramic substrate around the opening on an opposite side of the ceramic substrate from the MEMS device;
wherein the metal port is not formed in a metal housing that surrounds the ceramic substrate.
2. The MEMS system of claim 1 , wherein the MEMS device is a pressure sensor.
3. The MEMS system of claim 1 , wherein the pressure sensor includes a diaphragm exposed to the opposite side of the ceramic substrate through the opening.
4. The MEMS system of claim 1 , wherein the metal port is a tube.
5. The MEMS system of claim 4 , wherein the tube is copper.
6. The MEMS system of claim 1 , further comprising a non-metallic housing that couples to the ceramic substrate on the first side of the ceramic substrate and encloses the MEMS device on the first side of the ceramic substrate.
7. The MEMS system of claim 6 , wherein the non-metallic housing is made from ceramic.
8. The MEMS system of claim 1 , further comprising signal conditioning circuitry for the MEMS device wherein the signal conditioning circuitry is mounted on the first side of the ceramic substrate.
9. The MEMS system of claim 6 , wherein the non-metallic housing also encloses signal conditioning circuitry for the MEMS device mounted on the first side of the ceramic substrate.
10. The MEMS system of claim 1 , further comprising a metallic layer deposited around the opening on the opposite side of the ceramic substrate between the ceramic substrate and the metal port and designed to allow the metal port to be soldered to the substrate.
11. A MEMS system comprising:
a MEMS device including a front side and a backside;
a ceramic substrate with an opening that traverses the ceramic substrate wherein the backside of the MEMS device is hermetically sealed to a first side of the ceramic substrate around the opening; and,
a non-metallic housing that couples to the ceramic substrate on the first side and encloses the MEMS device on the first side of the ceramic substrate.
12. The MEMS system of claim 11 , wherein the non-metallic housing is made from ceramic.
13. The MEMS system of claim 11 , further comprising signal conditioning circuitry for the MEMS device wherein the signal conditioning circuitry is mounted on the first side of the ceramic substrate.
14. The MEMS system of claim 13 , wherein the non-metallic using also encloses the signal conditioning circuitry.
15. The MEMS system of claim 11 , further comprising a metal port aligned with the opening and hermetically sealed to the ceramic substrate around the opening on an opposite side of the ceramic substrate from the MEMS device.
16. The MEMS system of claim 15 , wherein the port is not formed in a metal housing that surrounds the ceramic substrate.
17. A method of packaging a MEMS device comprising:
hermetically sealing a MEMS device around an opening in a ceramic substrate on a first side of the ceramic substrate wherein a backside of the MEMS device is exposed to an opposite side of the ceramic substrate through the opening;
mounting signal conditioning electronics for the MEMS device on the first side of the ceramic substrate;
enclosing the MEMS device and signal conditioning electronics on the first side of the ceramic substrate with a non-metallic housing;
depositing a layer of metallic paste around the opening on the opposite side of the ceramic substrate; and,
hermetically sealing a metal port to the ceramic substrate by soldering the metal port to the metallic layer wherein the metal port is not formed as part of a metal housing that surrounds the ceramic substrate.
18. The method of claim 17 , wherein the metal port is a metal tube with an outside diameter less than an outside diameter of the ceramic substrate.
19. The method of claim 18 , wherein the metal tube is a copper tube.
20. The method of claim 17 , wherein the depositing step is performed by screen printing the metallic paste around the opening.
21. A method of packaging a MEMS device comprising:
hermetically sealing a MEMS sensor around an opening in a ceramic substrate on a first side of the ceramic substrate wherein a backside of the MEMS device is exposed to an opposite side of the ceramic substrate through the opening;
hermetically sealing a metal tube to the opposite side of the ceramic substrate over the opening wherein the ceramic substrate has an outside diameter at least twice the outside diameter of the metal tube.