IP Library Granted Patent US 9,496,209
Granted Patent B2
US 9,496,209 · App. 14/992,535 · Granted Nov 15, 2016

High density organic bridge device and method

Inventors: Mihir K. Roy (Chandler, AZ); Stefanie M. Lotz (Phoenix, AZ); Wei-Lun Kane Jen (Chandler, AZ)
Assignee: Intel Corporation
H01L23/49811H01L21/4853H01L23/145H01L23/49866H01L23/5385H01L25/0655H01L24/16H01L24/81H01L2224/16225H01L2224/81203H01L2924/12042H01L2924/15192H05K1/0313H05K1/142H05K1/181H05K3/467H05K2201/10522H05K2201/10674H05K2203/016
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Quick Facts
Patent No.
US 9,496,209
App. No.
14/992,535
Granted
Nov 15, 2016
Kind
B2
Abstract

Embodiments that allow multi-chip interconnect using organic bridges are described. In some embodiments an organic package substrate has an embedded organic bridge. The organic bridge can have interconnect structures that allow attachment of die to be interconnected by the organic bridge. In some embodiments, the organic bridge comprises a metal routing layer, a metal pad layer and interleaved organic polymer dielectric layers but without a substrate layer. Embodiments having only a few layers may be embedded into the top layer or top few layers of the organic package substrate. Methods of manufacture are also described.

Claims (38)

1. A microelectronic package comprising:

an organic polymer substrate created using a first set of design rules having a first wire width of about 40 μm and first wire spacing of about 40 μm;

an organic polymer bridge embedded in the substrate, created using a second set of design rules in at least portion of the organic polymer bridge, the second set of design rules having a second wire width of about 3 μm and a second wire spacing of about 3 μm;

a first interconnect structure at a first location of the organic polymer bridge and a second interconnect structure at a second location of the organic polymer bridge; and

an electrically conductive path in the organic polymer bridge connecting the first interconnect structure to the second interconnect structure.

2. The microelectronic package of claim 1 wherein the organic polymer substrate contains a recess and the organic polymer bridge is embedded into the recess using an organic polymer.

3. The microelectronic package of claim 2 wherein the organic polymer substrate and the organic polymer bridge are made from the same organic polymer.

4. The microelectronic package of claim 2 wherein the organic polymer substrate and the organic polymer bridge are made from different organic polymers.

5. The microelectronic package of claim 2 wherein the organic polymer used to bond the organic polymer bridge to the organic polymer substrate is a die bonding film or an epoxy.

6. The microelectronic package of claim 1 wherein the organic polymer bridge comprises a third set of design rules in at least one other portion of the organic bridge, the third set of design rules having third wire width of about 10 μm and a third wire spacing of about 10 μm.

7. The microelectronic package of claim 1 wherein the organic polymer bridge has a total thickness of less than about 20 μm.

8. An organic bridge adapted to interconnect a plurality of die, the organic bridge comprising:

a plurality of metal routing layers;

a metal pad layer;

at least a portion of the plurality of metal routing layers or at least a portion of the metal pad layer or at least a portion of both adhering to a first set of design rules having a first wire width of about 3 μm and first wire spacing of about 3 μm;

interleaved organic polymer dielectric layers between each metal routing layer and the metal pad layer; and

wherein there is no layer made substantially of silicon.

9. The organic bridge of claim 8 wherein at least a second portion of the plurality of metal routing layers or at least a second portion of the metal pad layer or at least a second portion of both adhering to a second set of design rules having a second wire width of about 10 μm and second wire spacing of about 10 μm.

10. The organic bridge of claim 8 wherein all layers have a combined thickness of about 15 μm.

11. The organic bridge of claim 8 wherein the metal pad layer comprises a plurality of interconnect structures.

12. The organic bridge of claim 11 wherein a first of the plurality of interconnect structures is adapted to connect to a first die and wherein a second of the plurality of interconnect structures is adapted to connect to a second die.

13. The organic bridge of claim 8 wherein the organic polymer bridge has a thickness of about 15 μm to about 20 μm.

14. A microelectronic package comprising:

an organic polymer package substrate created using a first set of design rules having a first wire width of about 40 μm and first wire spacing of about 40 μm; and

an organic polymer bridge created using a second set of design rules in at least a portion of the organic bridge having a second wire width of about 3 μm and a second wire spacing of about 3 μm, the organic polymer bridge comprising a metal pad layer, a metal routing layer and interleaved dielectric layers, the organic polymer bridge being embedded in the organic polymer package substrate.

15. The microelectronic package of claim 14 wherein the organic polymer bridge has a thickness of about 15 μm to about 20 μm.

16. The microelectronic package of claim 14 wherein the organic polymer bridge comprises a third set of design rules in at least one other portion of the organic bridge, the third set of design rules having third wire width of about 10 μm and a third wire spacing of about 10 μm.

17. A method comprising:

providing an organic bridge comprising:

a plurality of metal routing layers;

a metal pad layer;

at least a portion of the plurality of metal routing layers or at least a portion of the metal pad layer or at least a portion of both adhering to a first set of design rules having a first wire width of about 3 μm and first wire spacing of about 3 μm;

interleaved organic polymer dielectric layers between each metal routing layer and the metal pad layer, wherein there is no layer made substantially of silicon;

providing an organic package substrate having a recess formed therein; and

bonding the organic bridge into the recess of the organic package using an organic polymer.

18. The method of claim 17 , wherein all layers of the organic bridge have a thickness of about 15 gm to about 20 gm.

19. The method of claim 17 wherein the metal pad layer comprises a plurality of interconnects and wherein the method further comprises bonding a first die to one of the plurality of interconnects and bonding a second die to another of the plurality of interconnects, the bonding of the first die and the second die being accomplished using thermo-compression based bonding.

20. The method of claim 17 , wherein the organic bridge is bonded into a single buildup layer of the organic package substrate.

Continuity (2)
Continuation 13722203 · Dec 20, 2012
Related Publication 20160133552A1 · May 12, 2016