Solar cell emitter region fabrication using ion implantation
Methods of fabricating solar cell emitter regions using ion implantation, and resulting solar cells, are described. In an example, a back contact solar cell includes a crystalline silicon substrate having a light-receiving surface and a back surface. A first polycrystalline silicon emitter region is disposed above the crystalline silicon substrate. The first polycrystalline silicon emitter region is doped with dopant impurity species of a first conductivity type and further includes ancillary impurity species different from the dopant impurity species of the first conductivity type. A second polycrystalline silicon emitter region is disposed above the crystalline silicon substrate and is adjacent to but separated from the first polycrystalline silicon emitter region. The second polycrystalline silicon emitter region is doped with dopant impurity species of a second, opposite, conductivity type. First and second conductive contact structures are electrically connected to the first and second polycrystalline silicon emitter regions, respectively.
1. A back contact solar cell, comprising:
a crystalline silicon substrate having a light-receiving surface and a back surface;
a first polycrystalline silicon emitter region disposed above the crystalline silicon substrate, the first polycrystalline silicon emitter region doped with dopant impurity species of a first conductivity type and further comprising ancillary impurity species different from the dopant impurity species of the first conductivity type, wherein the ancillary impurity species are disposed to a depth shallower than the dopant impurity species of the first conductivity type, and wherein the ancillary impurity species overlap with and are misaligned with the dopant impurity species of the first conductivity type;
a second polycrystalline silicon emitter region disposed above the crystalline silicon substrate and adjacent to but separated from the first polycrystalline silicon emitter region, the second polycrystalline silicon emitter region doped with dopant impurity species of a second, opposite, conductivity type; and
first and second conductive contact structures electrically connected to the first and second polycrystalline silicon emitter regions, respectively.
2. The back contact solar cell of claim 1 , wherein the dopant impurity species of the first conductivity type comprises phosphorous or arsenic atoms, wherein the dopant impurity species of the second conductivity type comprises boron atoms, and wherein the ancillary impurity species comprises a species selected from the group consisting of nitrogen atoms, carbon atoms, and oxygen atoms.