Manufacturing method for liquid crystal display device
View Patent ↗A LCD device having a large pixel holding capacitance includes opposedly facing first and second substrates, and liquid crystal between them. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode connected to the video signal line and a second electrode connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film above the first silicon nitride film, a capacitance electrode above the organic insulation film, and a second silicon nitride film above the capacitance electrode and below the pixel electrode. A contact hole etched in both the first and second silicon nitride films connects the second electrode and the pixel electrode to each other. A holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
1. A display device comprising: a substrate;
a first inorganic insulation film above the substrate, having a first hole in a contact region;
an organic insulation film above the first inorganic insulation film, having a second hole in the contact region; and
a second inorganic insulation film above the organic insulating film, covering a sidewall of the second hole, and having a third hole in the contact region, wherein
the first inorganic insulation film contacts the second inorganic insulation film without the organic insulation film therebetween in the contact region.
2. The display device according to claim 1 , further comprising a first transparent conductive film and a metal portion, wherein
the first transparent conductive film is above the organic insulation film and is below the second inorganic insulation film,
the metal portion contacts the first transparent conductive film.
3. The display device according to claim 2 , wherein the metal portion has at least two-layered structure including a upper layer and a lower layer.
4. The display device according to claim 3 , wherein the lower layer of the metal portion contacts the first transparent conductive film.
5. The display device according to claim 3 , wherein the upper layer of the metal portion includes a material at least containing an aluminum.
6. The display device according to the claim 5 , wherein the lower layer of the metal portion includes a material at least containing a molybden or tungsten.
7. The display device according to claim 3 , wherein a thickness of the upper layer is larger than a thickness of the lower layer.
8. The display device according to claim 2 , wherein the first transparent conductive film and the metal portion are located near the contact region and not overlapped to the second hole.
9. The display device according to claim 8 , further comprising:
a display area performing a display of an image, wherein the display area has a plurality of the contact region, and
the plurality of the contact region are arranged in a matrix form, the metal portion is located between the two contact regions.
10. The display device according to claim 2 , further comprising a second transparent conductive film above the second insulation film, wherein
the second transparent conductive film covers a sidewall of the first hole and a sidewall of the third hole.
11. The display device according to the claim 10 , wherein the second transparent conductive film is not contacted to the sidewall of the second hole.