Thin film transistor substrate and method of manufacturing the same
View Patent ↗A thin film transistor substrate includes a base substrate, an active pattern disposed on the base substrate, a gate insulation pattern disposed on the active pattern, a gate electrode disposed on the gate insulation pattern and overlapping the channel, and a light-blocking pattern disposed between the base substrate and the active pattern and having a size greater than the active pattern. The active pattern includes a source electrode, a drain electrode, and a channel disposed between the source electrode and the drain electrode.
1. A thin film transistor substrate comprising:
a data line on a base substrate;
a first insulation layer on the data line;
an active pattern on the first insulation layer, the active pattern comprising a source region, a drain region and a channel disposed between the source region and the drain region;
a light-blocking pattern disposed between the active pattern and the first insulation layer covering the data line;
a gate electrode overlapping the channel;
a second insulation layer on the active pattern and the gate electrode; and
a connecting electrode passing through the second insulation layer and the first insulation layer to be electrically connected to the data line and passing through the second insulation layer to be electrically connected to the source region of the active pattern,
wherein the light-blocking pattern is larger than the active pattern in a plan view.
2. The thin film transistor substrate of claim 1 , wherein the light-blocking pattern comprises at least one selected from the group of consisting of a metal, an alloy, an inorganic insulation material and an organic insulation material.
3. The thin film transistor substrate of claim 1 , further comprising a buffer layer disposed between the light-blocking pattern and the active pattern.
4. The thin film transistor substrate of claim 1 , further comprising a gate insulation pattern disposed between the active pattern and the gate electrode.
5. The thin film transistor substrate of claim 4 , wherein the gate insulation pattern has a substantially same shape as the gate electrode.
6. The thin film transistor substrate of claim 1 , further comprising a third insulation layer on the second insulation layer.
7. The thin film transistor substrate of claim 6 , wherein at least a portion of the connecting electrode is disposed on the third insulation layer.
8. A thin film transistor substrate comprising:
a data line on a base substrate;
a first insulation layer on the data line;
an active pattern on the first insulation layer, the active pattern comprising a source region, a drain region and a channel disposed between the source region and the drain region;
a gate electrode overlapping the channel;
a second insulation layer on the active pattern and the gate electrode;
a light-blocking pattern between the active pattern and the first insulation layer covering the data line;
a connecting electrode passing through the second insulation layer and the first insulation layer to be electrically connected to the data line and passing through the second insulation layer to be electrically connected to the source region of the active pattern; and
a pixel electrode passing through the second insulation layer to be electrically connected to the drain region of the active pattern,
wherein the connecting electrode comprises a same material as the pixel electrode.
9. A thin film transistor substrate comprising:
a data line on a base substrate;
a first insulation layer on the data line;
an active pattern on the first insulation layer, the active pattern comprising a source region, a drain region and a channel disposed between the source region and the drain region;
a gate electrode overlapping the channel;
a second insulation layer on the active pattern and the gate electrode;
a light-blocking pattern between the active pattern and the first insulation layer covering the data line; and
a connecting electrode passing through the second insulation layer and the first insulation layer to be electrically connected to the data line and passing through the second insulation layer to be electrically connected to the source region of the active pattern,
wherein the connecting electrode comprises a transparent conductive material.
10. The thin film transistor substrate of claim 9 , wherein the active pattern comprises a metal oxide.
11. The thin film transistor substrate of claim 9 , wherein the light-blocking pattern comprises at least one selected from the group of consisting of a metal, an alloy, an inorganic insulation material and an organic insulation material.
12. The thin film transistor substrate of claim 9 , further comprising a gate insulation pattern disposed between the active pattern and the gate electrode.
13. The thin film transistor substrate of claim 9 , further comprising a third insulation layer on the second insulation layer.
14. The thin film transistor substrate of claim 9 , further comprising a pixel electrode passing through the second insulation layer to be electrically connected to the drain region of the active pattern,
wherein the connecting electrode comprises a same material as the pixel electrode.