Granted Patent B2

US 10,008,629 · App. 15/012,502 · Granted Jun 26, 2018

Abstract

Claims (32)

1. A nitride-semiconductor light emitting device comprising:

a substrate;

a first heterostructure;

a second heterostructure;

a light emitting region comprising:

barrier layers comprising AlGaN; and

one or more quantum wells comprising AlGaN, each quantum well respectively disposed between two of the barrier layers, the light emitting region disposed between the first and second heterostructures and configured to emit light having a central wavelength, λ, and a degree of polarization, P D , where P D >0.006λ−b for 200 nm≤λ≤400 nm, wherein b≤1.5, wherein the first heterostructure is disposed between the light emitting region and the substrate and includes a transition layer comprising a two section AlN/GaN superlattice, the two section AlN/GaN superlattice having a first surface near the substrate and a second surface near the light emitting region, the two section superlattice configured to transition Al content of the device from a higher Al content near the first surface to a lower Al content near the second surface.

2. The device of claim 1 , wherein b is about 1.

3. The device of claim 1 , wherein the light emitting region comprises at least one of GaN, InAlN, AlGaN, InGaN and InAlGaN.

4. The device of claim 1 , further comprising a substrate, the substrate comprising at least one of sapphire, GaN, AlN, AlGaN, InAlGaN, Si, and SiC.

5. The device of claim 1 , further comprising a bulk crystalline AlN substrate.

6. The device of claim 5 , wherein:

the AlN substrate has a lattice constant, a bulk-AlN ;

the light emitting region comprises at least one Al x Ga 1-x N region; and

the at least one Al x Ga 1-x N region has an in-plane lattice constant a strained and a strained −a bulk-AlN (λ(nm)−230)*0.0012 Å.

7. The device of claim 6 , wherein the Al x Ga 1-x N region is disposed between two Al y Ga 1-y N regions, where 0≤y≤1, y>x and y>0.7+0.02*(245−λ(nm)).

8. The device of claim 1 , wherein the light emitting region comprises at least one Al x Ga 1-x N layer and wherein the strain ε a in the Al x Ga 1-x N layer satisfies the inequality ε a <−0.0079+0.00022*(λ(nm)−240 nm).

9. The device of claim 1 , wherein λ≤300 nm and P D ≥0.

10. The device of claim 1 , further comprising a base layer disposed between the substrate and the first heterostructure, wherein the base layer comprises Al zbase Ga 1-zbase N, where zbase is between 0 and 1.

11. The device of claim 1 , wherein:

a first section of the AlN/GaN superlattice has an average aluminum molar fraction of about 90%; and

a second section of the AlN/GaN superlattice has an average aluminum, molar fraction of about 80%.

12. The device of claim 1 , wherein a transition layer surface closest to the light emitting region has a surface roughness less than about 10 nm.

13. A nitride semiconductor light emitting device, comprising:

a bulk crystalline AlN substrate;

a light emitting region comprising AlGaN grown above the bulk crystalline AlN substrate; and

a first heterostructure disposed between the light emitting region and the bulk crystalline AlN substrate, the first heterostructure including a transition layer comprising an AlN/GaN superlattice, wherein variation in reciprocal lattice values of the bulk crystalline AlN substrate and the light emitting region is less than about 1.5% and wherein the light emitting region is configured to emit light having a central wavelength, λ, and a degree of polarization, P D , where P D is greater than 0.006λ−1.5 for 200≤λ≤400 nm, the AlN/GaN superlattice having a first surface near the substrate and a second surface near the light emitting region, an Al content of the AlN/GaN superlattice changing from a higher Al content near the first surface to a lower Al content near the second surface.

14. The device of claim 13 , wherein:

the AlN substrate has a lattice constant, a bulk-AlN ;

the light emitting region comprises at least one Al x Ga 1-x N region; and

the at least one Al x Ga 1-x N region has an in-plane lattice constant a strained that satisfies the inequality a strained −a bulk-AlN ≤(λ(nm)−230)*0.0012 Å.

15. The device of claim 14 , wherein the Al x Ga 1-x N region is disposed between two Al y Ga 1-y N regions, and wherein 0≤y≤1, y>x and y>0.7+0.02*(245−λ(nm)).

Assignments (9)