Electro-optical device, manufacturing method of electro-optical device, and electronic apparatus
An electro-optical apparatus has an element substrate that is provided with a mirror and a sealing member which seals the mirror, and the sealing member includes a light-transmitting cover which faces the mirror opposite from the element substrate. An infrared cut filter is laminated on the light-transmitting cover.
1. An electro-optical device comprising:
an element substrate;
a mirror that is provided on a first face side of the element substrate;
a driving element that drives the mirror;
a sealing member that has a light-transmitting cover and is provided such that the mirror is positioned between the light-transmitting cover and the element substrate;
an infrared cut filter that is provided on the light-transmitting cover;
a substrate having a concave substrate mounting section that accommodates the element substrate in an interior thereof, the substrate mounting section having an opening end that is closed using the light-transmitting cover which is fixed on the substrate: and
a lead terminal that extends outside from the substrate, the lead terminal having a bent section that is bent in a direction in which a leading end section of the lead terminal is away from the substrate.
2. The electro-optical device according to claim 1 ,
wherein the infrared cut filter is formed of a film that is laminated on at least one of a second face of the light-transmitting cover and a third face of the light-transmitting cover, the second face faces the mirror, and the third face is on an opposite side from the second face.
3. The electro-optical device according to claim 1 ,
wherein the lead terminal includes a convex section that protrudes in a direction which intersects with an extension direction of the lead terminal.
4. The electro-optical device according to claim 1 ,
wherein a heat dissipation unit is provided on a face on an opposite side from the element substrate of the substrate.
5. The electro-optical device according to claim 4 ,
wherein the heat dissipation unit is a heat sink on which a heat dissipation fin is provided.
6. The electro-optical device according to claim 1 ,
wherein the sealing member includes a spacer that surrounds a region in which the mirror is formed between the element substrate and the light-transmitting cover, and
a sealing resin that seals around the spacer is provided inside the substrate mounting section.
7. The electro-optical device according to claim 1 ,
wherein the light-transmitting cover is fixed using sealing glass on the substrate.
8. An electronic apparatus provided with the electro-optical device according to claim 1 , comprising:
a light source section which irradiates light from a light source onto the mirror.