Nitride semiconductor
According to this GaN-based HFET, resistivity ρ of a semi-insulating film forming a gate insulating film is 3.9×10 9 Ωcm. The value of this resistivity ρ is a value derived when the current density is 6.25×10 −4 (A/cm 2 ). By inclusion of the gate insulating film by a semi-insulating film having a resistivity ρ=3.9×10 9 Ωcm, a withstand voltage of 1000 V can be obtained. Meanwhile, the withstand voltage abruptly drops as the resistivity of the gate insulating film exceeds 1 ×10 11 Ωcm, and the gate leak current increases when the resistivity of the gate insulating film drops below 1 ×10 7 Ωcm.
1. A nitride semiconductor comprising:
a substrate;
an initial growth layer formed on the substrate;
a buffer layer formed on the initial growth layer;
a superlattice buffer layer formed on the buffer layer;
a channel layer which is formed on the superlattice buffer layer and which is composed of a plurality of layers; and
a barrier layer formed on the channel layer,
wherein the superlattice buffer layer is formed by alternately stacking high-Al content layers which have the composition Al x Ga 1-x N (0.5≦x≦1.0) and a thickness a and low-Al content layers which have the composition Al y Ga 1-y N (0≦y≦0.3) and a thickness b, the channel layer is joined to the superlattice buffer layer and is formed by stacking at least an Al z Ga 1-z N layer and a GaN layer in that order from the superlattice buffer layer side, and the Al composition of the AlzGa 1-z N layer is the same as the average Al composition of the superlattice buffer layer.
2. The nitride semiconductor according to claim 1 , wherein the Al composition z of the Al z Ga 1-z N layer of the channel layer is given by the following equation:
z =( a×x+b×y )/( a+b ).
3. The nitride semiconductor according to claim 1 , wherein the barrier layer includes an Al w Ga 1-w N layer and the Al composition w of the Al w Ga 1-w N layer is greater than the Al composition z of the Al z Ga 1-z N layer of the channel layer.
4. The nitride semiconductor according to claim 1 , wherein the thickness a of the high-Al content layers in the superlattice buffer layer ranges from 1 nm to 5 nm and the thickness b of the low-Al content layers ranges from 22 nm to 30 nm.
5. The nitride semiconductor according to claim 2 , wherein the barrier layer includes an Al w Ga 1-w N layer and the Al composition w of the Al w Ga 1-w N layer is greater than the Al composition z of the Al z Ga 1-z N layer of the channel layer.
6. The nitride semiconductor according to claim 2 , wherein the thickness a of the high-Al content layers in the superlattice buffer layer ranges from 1 nm to 5 nm and the thickness b of the low-Al content layers ranges from 22 nm to 30 nm.
7. The nitride semiconductor according to claim 3 , wherein the thickness a of the high-Al content layers in the superlattice buffer layer ranges from 1 nm to 5 nm and the thickness b of the low-Al content layers ranges from 22 nm to 30 nm.