Production method for semiconductor element, and semiconductor element
A production method for a semiconductor element ( 10 ) includes: a semiconductor element forming step of forming the semiconductor element ( 10 ) including a dielectric film ( 3 ); a dicing region forming step of forming dicing regions ( 11 ) by removing the dielectric film ( 3 ) in partition regions that partition the semiconductor element ( 10 ); and a dicing step of dicing the dicing regions ( 11 ).
1. A production method for a semiconductor element comprising:
a semiconductor element forming step of forming a plurality of semiconductor elements by forming a dielectric film on a GaN-based semiconductor film formed on a substrate;
a dicing region forming step of forming groove-shaped dicing regions by using etching to remove the dielectric film in partition regions that partition the plurality of semiconductor elements; and
a dicing step of separating the plurality of semiconductor elements from each other by dicing the dicing regions.
2. The production method for a semiconductor element according to claim 1 ,
wherein the dielectric film remains at the both side portions of the partition region in the dicing region forming step.
3. The production method for a semiconductor element according to claim 1
wherein a dicing blade is used in the dicing step.
4. The production method for a semiconductor element according to claim 3 ,
wherein the dicing blade includes at least a uniaxial rotary blade that cuts the GaN-based semiconductor film and a biaxial rotary blade that cuts the substrate, and
wherein the dicing is performed by a step cut method in the dicing step.
5. The production method for a semiconductor element according to claim 1 , wherein in the dicing region forming step, masking is performed on regions other than the partition regions, and the dielectric film in the partition regions is removed by use of wet etching.