Pressure sensor
View Patent ↗In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed. The pressure sensor is a pressure sensor obtained by arranging, on a diaphragm having a long side and a short side, a sensor chip in which four strain gauges having the same characteristic and constituting a bridge circuit are provided, the pressure sensor being for detecting, in the bridge circuit, voltage output that is in proportion to a pressure applied to the diaphragm, and the pressure sensor is configured as follows: the four strain gauges are arranged to be adjacent to one another in the vicinity of the center of the diaphragm so that two strain gauges are arranged along the short side and the other two strain gauges are arranged along the long side; and the diaphragm has a thin portion in a long-side direction seen from the sensor chip.
1. A pressure sensor, comprising:
a sensor housing having a diaphragm shaped to have a long side and a short side; and
a sensor chip including four strain gauges, wherein,
in the pressure sensor, the sensor chip is provided on the sensor housing such that the four strain gauges are positioned in a region of the diaphragm,
two strain gauges of the four strain gauges are provided on the sensor chip in a short-side direction of the diaphragm,
the other two strain gauges are provided on the sensor chip in a long-side direction of the diaphragm,
the four strain gauges are provided on the sensor chip so as to be positioned in a central portion of the diaphragm, and
the minimum thickness of the diaphragm in a cross-section in the long-side direction, the cross-section being across the center of the diaphragm, is thinner than the minimum thickness of the diaphragm in a cross-section in the short-side direction, the cross-section being across the center of the diaphragm.
2. The pressure sensor according to claim 1 , wherein the diaphragm has, in the long-side direction seen from the sensor chip, a thin portion whose thickness is thinner than a thickness of a region in which the sensor chip is mounted.
3. The pressure sensor according to claim 2 , wherein
the sensor housing has a groove on a side in the long-side direction with respect to the sensor chip, and
the thin portion is formed by the groove.
4. The pressure sensor according to claim 3 , wherein
the groove is provided on a surface of the sensor housing, the surface being a surface on which the sensor chip is mounted, and
a length of the groove in the short-side direction is longer than a length of the sensor chip in the short-side direction.
5. The pressure sensor according to claim 2 , wherein the thin portion is formed by a step provided on a surface of the sensor housing, the surface being a surface on which the sensor chip is mounted.
6. The pressure sensor according to claim 1 , wherein the minimum thickness of the diaphragm in the cross-section in the long-side direction is formed by a groove provided on a side of the diaphragm, the side being a side that receives a pressure.
7. The pressure sensor according to claim 1 , wherein the diaphragm is shaped so that the maximum dimension in the short-side direction between the center and an end portion of the diaphragm in the long-side direction is larger than a dimension in the short-side direction in the vicinity of the center in the long-side direction.
8. The pressure sensor according to claim 1 , wherein a dimension in the short-side direction at the center of the diaphragm is smaller than a dimension of the sensor chip.
9. The pressure sensor according to claim 8 , wherein a dimension in the long-side direction at the center of the diaphragm is larger than the dimension of the sensor chip.
10. The pressure sensor according to claim 1 , wherein each of the four strain gauges is p-type single crystal silicon formed along a <110> crystal orientation.
11. A pressure sensor, comprising:
a sensor housing having a diaphragm shaped to have a long side and a short side; and
a sensor chip including four strain gauges, wherein,
in the pressure sensor, the sensor chip is provided on the sensor housing such that the four strain gauges are positioned in a region of the diaphragm,
two strain gauges of the four strain gauges are provided on the sensor chip in a short-side direction of the diaphragm,
the other two strain gauges are provided on the sensor chip in a long-side direction of the diaphragm,
the four strain gauges are provided on the sensor chip so as to be positioned in a central portion of the diaphragm,
the minimum thickness of the diaphragm in a cross-section in the long-side direction, the cross-section being across the center of the diaphragm, is thinner than the minimum thickness of the diaphragm in a cross-section in the short-side direction, the cross-section being across the center of the diaphragm,
the central portion of the diaphragm is shorter than: i) any side of the sensor chip, and ii) the long-side of the diaphragm, and
the central portion of the diaphragm is longer than a distance separating any of the strain gauges from one another.
12. The pressure sensor according to claim 11 , wherein the diaphragm has, in the long-side direction seen from the sensor chip, a thin portion whose thickness is thinner than a thickness of a region in which the sensor chip is mounted.
13. The pressure sensor according to claim 12 , wherein
the sensor housing has a groove on a side in the long-side direction with respect to the sensor chip, and
the thin portion is formed by the groove.
14. The pressure sensor according to claim 13 , wherein
the groove is provided on a surface of the sensor housing, the surface being a surface on which the sensor chip is mounted, and
a length of the groove in the short-side direction is longer than a length of the sensor chip in the short-side direction.
15. The pressure sensor according to claim 12 , wherein the thin portion is formed by a step provided on a surface of the sensor housing, the surface being a surface on which the sensor chip is mounted.
16. The pressure sensor according to claim 11 , wherein the minimum thickness of the diaphragm in the cross-section in the long-side direction is formed by a groove provided on a side of the diaphragm, the side being a side that receives a pressure.
17. The pressure sensor according to claim 11 , wherein the diaphragm is shaped so that the maximum dimension in the short-side direction between the center and an end portion of the diaphragm in the long-side direction is larger than a dimension in the short-side direction in the vicinity of the center in the long-side direction.
18. The pressure sensor according to claim 11 , wherein a dimension in the short-side direction at the center of the diaphragm is smaller than a dimension of the sensor chip.
19. The pressure sensor according to claim 18 , wherein a dimension in the long-side direction at the center of the diaphragm is larger than the dimension of the sensor chip.
20. The pressure sensor according to claim 11 , wherein each of the four strain gauges is p-type single crystal silicon formed along a <110> crystal orientation.