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App. No. 15/043,045 · Confirmation No. 3969

SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2019-08-09 ABN Abandonment 2 View
2018-12-12 CTNF Non-Final Rejection 10 View
2018-12-12 SRFW Search information including classification, databases and other search related notes 1 View
2018-12-12 SRNT Examiner's search strategy and results 4 View
2018-11-27 RCEX Request for Continued Examination (RCE) 1 View
2018-11-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2018-11-27 CLM Claims 3 View
2018-11-27 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2018-11-27 WFEE Fee Worksheet (SB06) 2 View
2018-11-27 N417 Electronic Filing System Acknowledgment Receipt 3 View
2018-11-27 WFEE Fee Worksheet (SB06) 1 View
2018-08-27 CTFR Final Rejection 11 View
2018-08-27 892 List of references cited by examiner 1 View
2018-08-27 SRFW Search information including classification, databases and other search related notes 1 View
2018-08-27 SRNT Examiner's search strategy and results 2 View
2018-06-15 WFEE Fee Worksheet (SB06) 1 View
2018-06-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2018-06-15 CLM Claims 3 View
2018-06-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2018-06-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-06-15 TRAN.LET Transmittal Letter 1 View
2018-03-15 892 List of references cited by examiner 1 View
2018-03-15 SRFW Search information including classification, databases and other search related notes 1 View
2018-03-15 CTNF Non-Final Rejection 12 View
2018-03-15 BIB Bibliographic Data Sheet 1 View
2018-03-15 SRNT Examiner's search strategy and results 2 View
2018-03-15 1449 List of References cited by applicant and considered by examiner 1 View
2018-01-24 ELC. Response to Election / Restriction Filed 1 View
2018-01-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-01-24 TRAN.LET Transmittal Letter 1 View
2017-12-01 BIB Bibliographic Data Sheet 1 View
2017-12-01 CTRS Requirement for Restriction/Election 7 View
2017-07-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2017-07-18 APP.FILE.REC Filing Receipt 3 View
2017-07-13 PA.. Power of Attorney 2 View
2017-07-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 6 View
2017-07-13 ADS Application Data Sheet 6 View
2017-07-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-01-19 NTC.PUB Notice of Publication 1 View
2016-03-02 WFEE Fee Worksheet (SB06) 1 View
2016-03-02 APP.FILE.REC Filing Receipt 3 View
2016-02-12 PA.. Power of Attorney 2 View
2016-02-12 TRAN.LET Transmittal Letter 1 View
2016-02-12 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2016-02-12 FOR Foreign Reference 7 View
2016-02-12 FOR Foreign Reference 12 View
2016-02-12 FOR Foreign Reference 9 View
2016-02-12 FOR Foreign Reference 33 View
2016-02-12 FOR Foreign Reference 12 View
2016-02-12 FOR Foreign Reference 11 View
2016-02-12 WFEE Fee Worksheet (SB06) 2 View
2016-02-12 N417 Electronic Filing System Acknowledgment Receipt 3 View
2016-02-12 TRNA Transmittal of New Application 1 View
2016-02-12 ADS Application Data Sheet 6 View
2016-02-12 SPEC Specification 17 View
2016-02-12 CLM Claims 3 View
2016-02-12 ABST Abstract 1 View
2016-02-12 DRW Drawings-only black and white line drawings 9 View
2016-02-12 OATH Oath or Declaration filed 2 View
2016-02-12 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
15/043,045
Filed
2016-02-12
Pub. No.
US20170018431A1
Art Unit
1794