Analytical apparatus, sample holder and analytical method

1. An analytical apparatus comprising:

a member comprising an inserting portion into which a sample holder supporting a sample is insertable and whose shape corresponds to a shape of the sample holder;

a voltage source connected to the member; and

a detector configured to detect a substance to be emitted from the sample by field evaporation,

wherein a shape of the inserting portion in a cross section of a direction perpendicular to an inserting direction of the sample holder is a shape excluding a perfect circle.

2. The apparatus of claim 1 ,

wherein the shape excluding the perfect circle is a shape in which a side is linked to another side to form an angle smaller than 180°.

3. The apparatus of claim 1 ,

wherein the shape excluding the perfect circle is a polygonal shape, an ellipse, or a circle comprising a concave portion or a convex portion.

4. The apparatus of claim 1 , further comprising:

a position adjusting section configured to change a tilt of the member to an arbitrary reference surface.

5. The apparatus of claim 1 , further comprising:

an analyzing section which processes a signal from the detector to prepare an atom probe image of the sample, and applies data of a grain boundary of crystals constituting the sample into the atom probe image to analyze the sample.

6. The apparatus of claim 5 ,

wherein the data of the crystal grain boundary is acquired by attaching the sample to an external inspection apparatus and irradiating the sample with a charged particle beam.

7. The apparatus of claim 1 , further comprising:

an analyzing section which processes a signal from the detector to prepare an atom probe image of the sample, and corrects a distortion of the atom probe image on the basis of data of a structure of the sample.

8. A sample holder comprising:

a first end portion to be connected to a sample; and

a second end portion which is present on a side opposite to the first end portion and comprises a shape excluding a perfect circle.

9. The sample holder of claim 8 ,

wherein the shape excluding the perfect circle is a shape in which a side is linked to another side to form an angle smaller than 180°.

10. The sample holder of claim 8 ,

wherein the shape excluding the perfect circle is a polygonal shape, an ellipse, or a circle comprising a concave portion or a convex portion.

11. An analytical method comprising:

irradiating a sample with a charged particle beam by a first apparatus to acquire a first signal;

removing the sample from the first apparatus and attaching the sample to a second apparatus;

applying a voltage to the sample to detect a substance to be emitted from the sample, thereby acquiring a second signal; and

analyzing the sample from the first signal and the second signal,

wherein a position of the sample in a rotating direction around a first line as an axis crossing a direction in which the charged particle beam enters into the sample in the first apparatus and passing the sample is substantially the same as a position of the sample in a rotating direction around a second line as an axis parallel to the first line when the voltage is applied in the second apparatus.

12. The method of claim 11 ,

wherein the analyzing comprises:

preparing an image of the sample from the first signal;

specifying a grain boundary of crystals constituting the sample from the sample image;

processing the second signal to prepare a three-dimensional atom probe image of the sample; and

applying data of the specified crystal grain boundary into the three-dimensional atom probe image, and

wherein the image is a transmission image, a diffraction image, or an electron back scatter diffraction image.

13. The method of claim 11 ,

wherein the analyzing comprises:

preparing an image of the sample from the first signal;

specifying a structure of the sample from the sample image;

processing the second signal to prepare a three-dimensional atom probe image of the sample; and

correcting the three-dimensional atom probe image on the basis of the sample structure,

wherein the image of the sample comprises at least one of a transmission image, a diffraction image, an electron back scatter diffraction image, a scanning electron microscope image and an energy filter image.

14. The method of claim 13 , further comprising:

preparing a shape model of the sample from the first signal;

calculating a second signal presumed from the shape model by simulation;

calculating a difference between the calculated second signal and the actually obtained second signal; and

comparing the difference with a threshold value,

wherein the three-dimensional atom probe image is corrected, when the difference is in excess of the threshold value.