Semiconductor manufacturing apparatus
View Patent ↗A semiconductor device manufacturing apparatus for encapsulating with a resin a semiconductor chip includes upper and lower molds configured to receive therebetween a lead frame on which the semiconductor chip is mounted. A positioning pin provided to the lower mold is configured to be received by a positioning hole provided in the lead frame. Ejector pins provided in proximity to the positioning pin are arranged so as to be symmetrical with respect to the positioning pin.
1. A semiconductor device manufacturing apparatus for encapsulating with a resin a semiconductor chip mounted on a lead frame, the semiconductor device manufacturing apparatus comprising:
an upper mold and a lower mold configured to receive therebetween a lead frame on which a semiconductor chip is mounted;
a positioning pin provided to the lower mold and configured to be received by a positioning hole provided in the lead frame; and
a plurality of ejector pins provided in proximity to the positioning pin and arranged so as to be symmetrical with respect to the positioning pin.
2. A semiconductor device manufacturing apparatus according claim 1 , further comprising another positioning pin provided to the upper mold; and wherein the plurality of ejector pins comprises a first pair of ejector pins disposed in proximity to and arranged so as to be symmetrical with the tapered positioning pin provided to the lower mold, and a second pair of ejector pins disposed in proximity to and arranged so as to be symmetrical with the tapered positioning pin provided to the upper mold.
3. A semiconductor device manufacturing apparatus for encapsulating with a resin a semiconductor chip mounted on a lead frame, the semiconductor device manufacturing apparatus comprising:
an upper mold and a lower mold configured to receive therebetween a lead frame on which a semiconductor chip is mounted;
a first positioning pin provided to the lower mold;
a second positioning pin provided to the upper mold;
at least one first ejector pin provided in proximity to the first positioning pin; and
at least one second ejector pin provided in proximity to the second positioning pin;
wherein the first positioning pin and the second positioning pin are offset from one another and are configured to be received by different positioning holes provided in the lead frame, and
wherein the first positioning pin has an end tip portion that protrudes upwardly above an uppermost surface of the lower mold and the second positioning pin has an end tip portion that protrudes downwardly below a lowermost surface of the upper mold.
4. A semiconductor device manufacturing apparatus according to claim 3 , wherein the at least one first ejector pin comprises a pair of first ejector pins; and wherein the at least one second ejector pin comprises a pair of second ejector pins.
5. A semiconductor device manufacturing apparatus according to claim 4 , wherein the pair of first ejector pins are arranged so as to be symmetrical to the first positioning pin; and wherein the pair of second ejector pins are arranged so as to be symmetrical to the second positioning pin.
6. A semiconductor device manufacturing apparatus according to claim 3 , wherein each of the first positioning pin and the second positioning pin has a tapered conical tip portion.
7. A semiconductor device manufacturing apparatus according to claim 3 , wherein the semiconductor chip mounted on the lead frame which the upper mold and the lower mold are configured to receive is encapsulated with a resin; and wherein the at least one first ejector pin and the at least one second ejector pin are configured to push the lead frame, but not the encapsulated semiconductor chip, to eject the lead frame from the upper and lower molds.
8. A semiconductor device manufacturing apparatus according to claim 1 , wherein the positioning pin has a tapered conical tip portion.
9. A semiconductor device manufacturing apparatus according to claim 1 , wherein the semiconductor chip mounted on the lead frame which the upper mold and the lower mold are configured to receive is encapsulated with a resin; and wherein the plurality of ejector pins are configured to push the lead frame, but not the encapsulated semiconductor chip, to eject the lead frame from the upper and lower molds.
10. A semiconductor device manufacturing apparatus for encapsulating with a resin a semiconductor chip mounted on a lead frame, the semiconductor device manufacturing apparatus comprising:
an upper mold and a lower mold configured to receive therebetween a lead frame on which a semiconductor chip is mounted;
a first positioning pin provided to the lower mold, the first positioning pin having a tapered conical tip portion;
a second positioning pin provided to the upper mold, the second positioning pin having a tapered conical tip portion;
at least one first ejector pin provided in proximity to the first positioning pin; and
at least one second ejector pin provided in proximity to the second positioning pin.
11. A semiconductor device manufacturing apparatus according to claim 10 , wherein the at least one first ejector pin comprises a pair of first ejector pins; and wherein the at least one second ejector pin comprises a pair of second ejector pins.
12. A semiconductor device manufacturing apparatus according to claim 11 , wherein the pair of first ejector pins are arranged so as to be symmetrical to the first positioning pin; and wherein the pair of second ejector pins are arranged so as to be symmetrical to the second positioning pin.
13. A semiconductor device manufacturing apparatus according to claim 10 , wherein the semiconductor chip mounted on the lead frame which the upper mold and the lower mold are configured to receive is encapsulated with a resin; and wherein the at least one first ejector pin and the at least one second ejector pin are configured to push the lead frame, but not the encapsulated semiconductor chip, to eject the lead frame from the upper and lower molds.