Semiconductor memory device
View Patent ↗A semiconductor memory device includes a first well of a first conductivity type, a memory cell array including a plurality of memory cells stacked above the first well, the memory cells including a first memory cell transistor, a first wiring above the memory cells array and electrically connected to the first memory cell transistor, and a controller configured to execute an erase operation in which an erase voltage is applied to the first wiring while the first well is in an electrically floating state.
1. A semiconductor memory device, comprising:
a first well of a first conductivity type;
a second well of a second conductivity type in the first well;
a memory cell array including a plurality of memory cells stacked above the first well and the second well, the memory cells including a first memory cell transistor;
a first wiring above the memory cell array and electrically connected to the first memory cell transistor;
a first sense amplifier electrically connected to the first wiring and located below the memory cell array; and
a controller configured to execute an erase operation in which an erase voltage is applied to the first wiring while the first well is in an electrically floating state.
2. The device according to claim 1 , further comprising:
a transistor electrically connected between a power supply and the first well, the transistor being turned off during the erase operation to cause the potential of the first well to be in the electrically floating state.
3. The device according to claim 2 ,
wherein a potential of the first well increases from a first potential to a second potential when the erase voltage is applied to the first wiring.
4. The device according to claim 3 , wherein
the second potential is higher than a potential of the power supply.
5. The device according to claim 1 , wherein transistors of the first sense amplifier have channel regions formed in the second well.
6. The device according to claim 5 , wherein
a potential of the second well increases to the second potential during the erase operation.
7. The device according to claim 1 , wherein
the memory cell array further includes a first block that includes a first memory string including the first memory cell transistor and a first select transistor, and a second block that includes a second memory string including a second memory cell transistor and a second select transistor, and
during the erase operation, first conductive lines electrically connected to gates of the first select transistor and the first select transistor are not in an electrically floating state, and second conductive lines electrically connected to gates of the second select transistor and the second select transistor are in an electrically floating state.
8. The device according to claim 7 , further comprising:
a first source line electrically connected to the first block;
a second source line electrically connected to the second block;
a first switch circuit between the first sense amplifier and the first source line; and
a second switch circuit between the first sense amplifier and the second source line.
9. The device according to claim 8 , further comprising:
a second wiring above the memory cell array and electrically connected to the second memory cell transistor; and
a second sense amplifier electrically connected to the second wiring, wherein
the first switch circuit is between the second sense amplifier and the first source line; and
the second switch circuit is between the sense second amplifier and the second source line.
10. A method of executing an erase operation in a semiconductor memory device including a first well of a first conductivity type, a memory cell array including a plurality of memory cells stacked above the first well, the memory cells including a first memory cell transistor, and a first wiring above the memory cell array and electrically connected to the first memory cell transistor, said method comprising:
turning off a transistor that is electrically connected between a power supply and the first well to cause the first well to be in an electrically floating state; and
applying an erase voltage to the first wiring, the erase voltage applied to the first wiring increasing a potential of the first well by capacitive coupling.
11. The method according to claim 10 ,
wherein a potential of the first well increases from a first potential to a second potential when the erase voltage is applied to the first wiring, the second potential being higher than a potential of the power supply.
12. The method according to claim 10 , wherein semiconductor memory device further includes:
a second well of a second conductivity type in the first well; and
a first sense amplifier electrically connected to the first wiring and located below the memory cell array.
13. The method according to claim 12 , wherein transistors of the first sense amplifier have channel regions formed in the second well.
14. The method according to claim 13 , wherein
a potential of the second well increases to the second potential during the erase operation.
15. The method according to claim 10 , wherein
the memory cell array further includes a first block that includes a first memory string including the first memory cell transistor, and a first select transistor, and a second block that includes a second memory string including a second memory cell transistor, and a second select transistor, and
during the erase operation, first conductive lines electrically connected to gates of the first select transistor and the first select transistor are not in an electrically floating state, and second conductive lines electrically connected to gates of the second select transistor and the second select transistor are in an electrically floating state.
16. The method according to claim 15 , wherein semiconductor memory device further includes:
a first source line electrically connected to the first block;
a second source line electrically connected to the second block;
a first switch circuit between the first sense amplifier and the first source line; and
a second switch circuit between the first sense amplifier and the second source line.
17. The method according to claim 16 , wherein semiconductor memory device further includes:
a second wiring above the memory cell array and electrically connected to the second memory cell transistor; and
a second sense amplifier electrically connected to the second wiring, wherein
the first switch circuit is between the second sense amplifier and the first source line; and
the second switch circuit is between the sense second amplifier and the second source line.