Semiconductor integrated circuit device and method of manufacturing the same
View Patent ↗A semiconductor integrated circuit device includes a fuse element that can be laser trimmed to adjust the characteristics of the semiconductor integrated circuit device, The semiconductor integrated circuit device includes an interlayer insulating film above the fuse element, and the thickness of the interlayer insulating film is reduced by using an amorphous silicon layer that is formed by sputtering as a material of the fuse element, and by forming the amorphous silicon layer at the same time as metal wiring is formed. The laser trimming processing is thus stabilized without needing a high level of dry etching stabilization control.
1. A semiconductor integrated circuit device, comprising:
a semiconductor substrate;
an insulating film formed on the semiconductor substrate;
two conductors made of metal and disposed at a distance from each other on the insulating film;
a first high-melting point metal film layered on each of the two conductors; and
a fuse element made from an amorphous silicon layer, which extends continuously between the two conductors and on the insulating film where the two conductors are spaced apart from each other, and which covers a top surface of each first high-melting point metal film and side surfaces of the two conductors.
2. A semiconductor integrated circuit device according to claim 1 , wherein a second high-melting point metal film, which has the same shape in plan view as a shape of the amorphous silicon layer, is formed under the amorphous silicon layer.
3. A semiconductor integrated circuit device according to claim 1 ,
wherein the semiconductor integrated circuit device comprises at least two metal wiring layers,
wherein the two conductors comprise a last metal wiring layer, which is the highest layer out of the at least two metal wiring layers, and
wherein, a protective film is disposed above the last metal wiring layer.
4. A semiconductor integrated circuit device according to claim 3 ,
wherein the protective film comprises a silicon oxide film and a silicon nitride film formed above the silicon oxide film, and
wherein the silicon nitride film is removed from above the fuse element to form an opening.
5. A semiconductor integrated circuit device according to claim 1 , wherein the first high-melting point metal film comprises one of a TiN film and a Ti compound film.
6. A semiconductor integrated circuit device according to claim 2 , wherein the second high-melting point metal film comprises one of a TiN film and a Ti compound film.
7. A semiconductor integrated circuit device according to claim 1 , wherein the amorphous silicon layer has a thickness of 150 Å or more and 1,000 Å or less.
8. A semiconductor integrated circuit device according to claim 3 , wherein the last metal wiring layer is used for wiring in other portions of the semiconductor integrated circuit device than the fuse element, and for a bonding pad.
9. A semiconductor integrated circuit device according to claim 8 , wherein the semiconductor integrated circuit device comprises an anti-reflection film that is formed from one of a TiN film and a Ti compound film, and that is absent from a space above the last metal wiring layer.