Method of manufacturing semiconductor device
View Patent ↗According to an embodiment, a method of manufacturing a semiconductor device includes forming a layered body by alternately stacking a first film and a second film in a plurality of layers, and etching a portion of the layered body to penetrate the layered body from a top to a bottom to form a predetermined shape. The second film includes a first processing object film having a predetermined composition and a second processing object film having a composition that causes the second processing object film to be etched by the etching more easily than the first processing object film. The second processing object film is included as at least one of layers of the second film.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a layered body by alternately stacking a first film and a second film as a plurality of layers; and
etching a portion of the layered body to penetrate the layered body from a top to a bottom to form a predetermined shape;
wherein each second film is either a first processing object film having a predetermined composition or a second processing object film having a composition that causes the second processing object film to be etched by the etching more easily than the first processing object film, and a plurality of the second processing object films are included in the layered body,
the plurality of the second processing object films are disposed at a lower side part of the layered body,
the first film is formed of a silicon oxide film,
the first processing object film is formed of a film containing silicon and nitrogen, and
the plurality of second processing object films are formed of a film containing silicon, nitrogen, and oxygen.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein
the first film is formed of a silicon oxide film, and
the second film is formed of a film containing silicon and nitrogen, such that the plurality of second processing object films differ in a ratio of silicon to nitrogen from the first processing object film.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein body,
a concentration of the oxygen is set higher in the second processing object film on a lower side.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein the second film is formed by use of a CVD method.
5. The method of manufacturing a semiconductor device according to claim 1 , wherein the etching is performed by use of a CF-based gas.
6. The method of manufacturing a semiconductor device according to claim 1 , wherein a memory hole, slit, or contact hole is formed in the layered body by the etching.