Flexible device
In one embodiment, a flexible device is provided. The flexible device may include a flexible substrate, a buffer layer, a light reflective layer, and a device layer. The buffer layer is located on the flexible substrate. The light reflective layer is located on the flexible substrate, wherein the light reflective layer has a reflection wavelength of 200 nm˜1100 nm, a reflection ratio of greater than 80%, and a stress direction of the light reflective layer is the same as a stress direction of the flexible substrate. The device layer is located on the light reflective layer and the buffer layer.
1. A flexible device, comprising:
a flexible substrate;
a buffer layer located on the flexible substrate;
a light reflective layer located on the flexible substrate, the light reflective layer has a reflection wavelength of 200 nm˜1100 nm, a reflection ratio of greater than 80%, a stress direction of the light reflective layer is the same as a stress direction of the flexible substrate, wherein the light reflective layer comprises a metal material and a ceramic material, the ceramic material comprises an oxide material, a nitride material or a combination thereof, and the ceramic material has a transmittance ratio of greater than 30% at a wavelength range of 200-1100 nm; and
a device layer located on the light reflective layer and the buffer layer, wherein the light reflective layer is located between the flexible substrate and the device layer.
2. The flexible device according to claim 1 , wherein the light reflective layer is located within the buffer layer.
3. The flexible device according to claim 2 , wherein the light reflective layer is a patterned light reflective layer, and the patterned light reflective layer does not overlap with a gate electrode of the device layer or does not overlap with a polysilicon layer of the device layer.
4. The flexible device according to claim 1 , further comprising a barrier layer, wherein the light reflective layer is located above the barrier layer and in between the barrier layer and the buffer layer.
5. The flexible device according to claim 4 , wherein the light reflective layer is a patterned light reflective layer, and the patterned light reflective layer does not overlap with a gate electrode of the device layer.
6. The flexible device according to claim 4 , wherein the light reflective layer is a patterned light reflective layer, and the patterned light reflective layer does not overlap with a polysilicon layer of the device layer.
7. The flexible device according to claim 1 , further comprising a light absorbing film, wherein the light absorbing film is located above the light reflective layer or located below the light reflective layer.
8. The flexible device according to claim 7 , wherein the light absorbing film is a multilayered structure, wherein the multilayered structure comprises stacked layers of different band gap materials.
9. The flexible device according to claim 7 , wherein the light absorbing film has a band gap range between 1.1 eV˜1.8 eV.
10. The flexible device according to claim 7 , wherein the light absorbing film is located within the buffer layer and is separated from the light reflective layer.
11. The flexible device according to claim 7 , wherein the light absorbing film is located within the buffer layer and is in contact with the light reflective layer.
12. The flexible device according to claim 7 , wherein the light absorbing film is a patterned light absorbing film, and the patterned light absorbing film does not overlap with a gate electrode of the device layer or does not overlap with a polysilicon layer of the device layer.
13. The flexible device according to claim 7 , wherein a material of the light absorbing film comprises amorphous Si, microcrystalline Si, Mo, Ti, Cr, W, Zr, V, Nb, Ta, Pt, Cu, Au, Zn, Cd, Al, Ag, C, Sn, or a combination thereof.
14. The flexible device according to claim 7 , wherein the light reflective layer is a patterned light reflective layer and the light absorbing film is a patterned light absorbing film, the patterned light reflective layer and the patterned light absorbing film have the same pattern.
15. The flexible device according to claim 7 , wherein the light reflective layer is a patterned light reflective layer and the light absorbing film is a patterned light absorbing film, the patterned light reflective layer and the patterned light absorbing film have different pattern.
16. The flexible device according to claim 1 , wherein the light reflective layer comprises a metal layer, a stacked layer comprising a metal layer and a ceramic layer, a stacked layer comprising a first ceramic layer, a metal layer and a second ceramic layer, or a combination thereof.
17. The flexible device according to claim 1 , wherein the metal material comprises Rh, Al, AlNd, Cu, Au, Ag, Al alloy, Rh alloy, or a combination thereof.
18. The flexible device according to claim 1 , wherein the device layer comprises:
a polysilicon layer comprising a source region, a drain region and a channel region located in between the source region and the drain region;
a gate insulating layer located on the polysilicon layer; and
a gate electrode located on the gate insulating layer.
19. The flexible device according to claim 1 , further comprising a dielectric layer located on the device layer.