Anti-static, anti-reflective coating
View Patent ↗An anti-reflective, anti-static coating, optical articles employing such a coating, and methods of forming the same. The coating formed of alternating layers of low, mid, and/or high refractive index oxide materials and one or more layers of electrically conductive, substantially non-oxide forms of the same materials employed to form the alternating layers of low, mid, and/or high refractive index oxide materials.
1. An anti-reflective, anti-static optical coating comprising:
a plurality of alternating layers of a transparent oxide form of a first material and a transparent oxide form of a second material different from the first material; and
an electrically conductive layer only comprising a non-oxide form of either the first material or the second material and having a thickness within a range of 2-12 nm;
wherein the optical coating has a transmittance of approximately 95 percent or greater.
2. The optical coating of claim 1 wherein the oxide form of the first material has a high refractive index.
3. The optical coating of claim 1 wherein the oxide form of the second material has a low refractive index.
4. The optical coating of claim 1 wherein the oxide form of the first material is zirconium dioxide.
5. The optical coating of claim 1 wherein the oxide form of the second material is silicon dioxide.
6. The optical coating of claim 1 wherein the first material is a transition metal.
7. The optical coating of claim 1 wherein the first material is zirconium.
8. The optical coating of claim 1 further comprising an adhesive layer formed of either the first material or the second material.
9. The optical coating of claim 1 wherein the optical coating comprises at least five layers.
10. An anti-reflective, anti-static optical lens comprising:
an optical substrate;
a plurality of layers of an oxide form of a first material applied over a surface of the optical substrate;
a plurality of layers of an oxide form of a second material applied over the surface of the optical substrate, at least one layer of the plurality of layers of the oxide form of the second material interposed between two layers of the plurality of layers of the oxide form of the first material; and
an electrically conductive layer consisting of an elemental or an alloy form of the first material or of the second material applied over the surface of the optical substrate and having a thickness within a range of 2-12 nm;
wherein the optical coating has a transmittance of approximately 95 percent or greater.
11. The optical lens of claim 10 wherein the optical substrate is a cast resin.
12. The optical lens of claim 10 wherein the first material is a transition metal or a metalloid.
13. A method for forming an anti-reflective, anti-static optical coating comprising:
transferring a substrate into a deposition chamber;
forming a plurality of alternating layers of an oxide form of a first target and an oxide form of a second target different from the first target on the substrate by reactive sputter deposition in the deposition chamber; and
forming an electrically conductive layer with a thickness within a range of 2-12 nm, a transmittance of approximately 95 percent or greater, and being composed of only a non-oxide form of the first target or the second target on a surface of one of the plurality of alternating layers by non-reactive sputter deposition in the deposition chamber.
14. The method for forming an anti-reflective, anti-static optical coating of claim 13 further comprising applying an adhesive layer formed of either the first material or the second material directly on a surface of the optical substrate.
15. The method for forming an anti-reflective, anti-static optical coating of claim 13 further comprising forming at least a total of five layers.
16. The method for forming an anti-reflective, anti-static optical coating of claim 14 wherein the adhesive layer is electrically conductive.
17. The method for forming an anti-reflective, anti-static optical coating of claim 13 wherein forming the plurality of alternating layers of the oxide form of the first material and the oxide form of the second material comprises forming high, mid, or low refractive index layers.
18. The method for forming an anti-reflective, anti-static optical coating of claim 13 wherein forming the electrically conductive layer of the first target or the second target on the surface of one of the plurality of alternating layers comprises forming a zirconium layer.
19. The method for forming an anti-reflective, anti-static optical coating of claim 13 wherein forming the electrically conductive layer of the first target or the second target on the surface of one of the plurality of alternating layers comprises forming a layer having a thickness in the range of approximately 1 to 10 nanometers.