Acoustic wave elements, antenna duplexers and electronic devices
View Patent ↗An acoustic wave element comprising a lithium tantalate substrate having the Euler angles (φ, θ, ψ), a first component φ satisfying 10°≤φ≤50°; and an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, the electrode having a density ρM satisfying ρM≥ρTi where ρTi represents a density of titanium (Ti), and a thickness hM of the electrode satisfies 0.141×exp(0.075ρM)λ≤hM≤0.134λ Embodiments of the present disclosure minimize a thickness of the electrode and suppress a spurious Rayleigh wave signal.
1. An acoustic wave element comprising:
a lithium tantalate substrate having Euler angles (φ, θ, ψ), a first component φ satisfying 10°≤φ≤50° and a second component θ satisfying −90°−0.5×(−0.2234ρ M 2 +6.9119ρ M −8.928)°≤θ≤−90°+0.5×(−0.2234ρ M 2 +6.9119ρ M −8.928)°; and
an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, where ρ M represents a density of the electrode, the electrode density ρ M satisfying ρ M ≥ρ Ti , where ρ Ti represents a density of titanium (Ti), and a thickness h M of the electrode satisfies 0.141×exp(−0.075ρ M )λ≤h M ≤0.134λ.
2. The acoustic wave element of claim 1 further comprising an insulation layer having a temperature coefficient opposite to that of the lithium tantalate substrate, the insulation layer covering the lithium tantalate substrate and the electrode.
3. The acoustic wave element of claim 2 wherein the insulation layer is made of silicon dioxide.
4. The acoustic wave element of claim 3 wherein the insulation layer has a thickness h S satisfying 0.08λ≤h S ≤0.55λ.
5. The acoustic wave element of claim 2 wherein the insulation layer includes a protrusion disposed above the electrode in a cross section taken along a direction perpendicular to an extending direction of electrode fingers of the electrode.
6. The acoustic wave element of claim 5 wherein a height h T of the protrusion and a thickness h M of the electrode satisfies 0≤h T ≤h M .
7. The acoustic wave element of claim 2 wherein a third component ψ satisfies (−371.81h S 2 +36.92h S +3.53)°≤ψ≤(−371.81h S 2 +36.92h S +13.53)°.
8. An antenna duplexer comprising:
a reception filter configured to pass a first frequency; and
a transmission filter configured to pass a second frequency, at least one of the reception and the transmission filters including the acoustic wave element of claim 1 .
9. A diplexer comprising:
a first reception filter configured to receive a first frequency band; and
a second reception filter configured to receive a second frequency band different than the first frequency band, at least one of the first reception filter and the second reception filter including the acoustic wave element of claim 1 .
10. A communications device comprising one of the antenna duplexer of claim 8 and the diplexer of claim 9 .
11. The communications device of claim 10 wherein the communications device is a mobile phone.
12. The acoustic wave element of claim 1 wherein the electrode is an Interdigitated Transducer (IDT) electrode having interdigitated electrode fingers.
13. The acoustic wave element of claim 12 wherein the IDT electrode includes one metal selected from a group consisting of titanium, molybdenum, tungsten and platinum.
14. The acoustic wave element of claim 13 wherein an aluminum layer is deposited on the IDT electrode.
15. The acoustic wave element of claim 14 wherein a thickness h M of the IDT electrode includes a thickness of the IDT electrode and a thickness of the aluminum layer.
16. The acoustic wave element of claim 13 wherein the second component θ satisfies −111°≤θ≤−69°.
17. The acoustic wave element of claim 16 wherein the IDT electrode includes tungsten.
18. The acoustic wave element of claim 1 wherein a third component ψ satisfies −16°≤ψ≤−2.5°.
19. An acoustic wave element comprising:
a lithium tantalite substrate having Euler angles (φθψ), a first component φ satisfying 10°≤φ≤50° and a third component ψ satisfying −16°≤ψ≤−2.5°;and
an electrode disposed on the lithium tantalate substrate and configured to excite a main acoustic wave of wavelength λ, the electrode having a density ρ M satisfying ρ M ≤ρ Ti ,where ρ Ti represents a density of titanium (Ti), and a thickness h M of the electrode satisfies 0.141×exp (−0.075ρ M )λ≤h M ≤0.134 λ.
20. The acoustic wave element of claim 19 further comprising an insulation layer having a temperature coefficient opposite to that of the lithium tantalate substrate, the insulation layer covering the lithium tantalate substrate and the electrode.