Dust collection apparatus and dust collection system

1. A dust collection system, comprising:

a dust collection apparatus including

a liquid supplier,

a liquid recoverer, and

a first member provided between the liquid supplier and the liquid recoverer, the first member having a first surface and a plurality of trenches provided in the first surface, the plurality of trenches extending in a direction toward the liquid recoverer from the liquid supplier; and

a processing chamber containing the dust collection apparatus, wherein

the first surface of the first member is exposed to ambient air in the processing chamber, and

the liquid supplier provides liquid flowing over the first surface along the plurality of trenches to the liquid recoverer, the liquid collecting dust particles in the ambient air while flowing over the first surface.

2. The system according to claim 1 , wherein

the processing chamber includes:

a support platform supporting a processing object;

a mounting surface where the support platform is mounted;

a bottom surface provided on a lower side of the mounting surface; and

a side surface provided around the support platform with a direction from the bottom surface toward the support platform as an axis, and

the dust collection apparatus is provided attachably and removably on at least one surface of the bottom surface, the mounting surface, or the side surface.

3. The system according to claim 2 , wherein

the first surface is disposed along the side surface, and

the liquid supplier is positioned above the liquid recoverer.

4. The system according to claim 2 , wherein

the first surface is disposed along the mounting surface or the bottom surface,

the liquid supplier is disposed at a position higher than the liquid recoverer, and

the first surface is tilted with respect to a direction of gravity.

5. The system according to claim 1 , wherein the processing chamber further includes a gas supplier blowing a gas toward the first surface.