THERMAL MANAGEMENT OF EVAPORATION SOURCES
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
1 . A thermal evaporation source comprising:
a hollow source body for containing a feedstock material for evaporation thereof;
an evaporation port for fluidly coupling the source body with an interior of a deposition chamber; and
a segmented insulation material configurable in (i) a first configuration in which a plurality of segments are each disposed snugly around the source body and (ii) a second configuration in which one or more of the segments are distanced away from the source body to allow heat loss therefrom.
2 . The thermal evaporation source of claim 1 , wherein two or more of the segments of insulation material are connected at hinged points.
3 . The thermal evaporation source of claim 1 , wherein the insulation material comprises at least one of carbon or a ceramic material.
4 . The thermal evaporation source of claim 1 , wherein the insulation material comprises at least one of graphite, carbon fiber, mullite, alumina, silica, or zirconia.
5 . The thermal evaporation source of claim 1 , wherein the insulation material comprises at least one of tantalum, niobium, or molybdenum.
6 . The thermal evaporation source of claim 1 , wherein the insulation material comprises a felt, a foam, a sol gel material, or a plurality of spaced-apart solid shields.
7 . A deposition system comprising:
an evaporation chamber having an interior enclosed by one or more chamber walls;
an evaporation source comprising (i) a hollow source body for containing a feedstock material for evaporation thereof, and (ii) an evaporation port for fluidly coupling the source body with the interior of a deposition chamber; and
a segmented insulation material configurable in (i) a first configuration in which a plurality of segments are each disposed snugly around the source body and (ii) a second configuration in which one or more of the segments are distanced away from the source body.
8 . The deposition system of claim 7 , wherein, when the segmented insulation material is configured in the second configuration, a direct line of sight between at least one said chamber wall of the evaporation chamber and at least a portion of the evaporation source is established.
9 . The deposition system of claim 7 , wherein two or more of the segments of insulation material are connected at hinged points.
10 . The deposition system of claim 7 , wherein the insulation material comprises at least one of carbon or a ceramic material.
11 . The deposition system of claim 7 , wherein the insulation material comprises at least one of graphite, carbon fiber, mullite, alumina, silica, or zirconia.
12 . The deposition system of claim 7 , wherein the insulation material comprises at least one of tantalum, niobium, or molybdenum.
13 . The deposition system of claim 7 , wherein the insulation material comprises a felt, a foam, a sol gel material, or a plurality of spaced-apart solid shields.
14 . The deposition system of claim 7 , further comprising one or more positioners for configuring the segmented insulation material into the first configuration and the second configuration.
15 . The deposition system of claim 14 , wherein at least one positioner comprises an actuator.
16 . The deposition system of claim 14 , further comprising a control system for controlling the one or more positioners.
17 . A deposition system comprising:
a deposition chamber having an interior enclosed by one or more chamber walls;
an evaporation source comprising (i) a hollow source body for containing a feedstock material for evaporation thereof, and (ii) an evaporation port for fluidly coupling the source body with the interior of the deposition chamber;
an insulation material; and
a controller for configuring the insulation material in (i) a first configuration in which the insulation material is disposed snugly around the source body and (ii) a second configuration in which at least a portion of the insulation material is distanced away from the source body.
18 . The deposition system of claim 17 , wherein, when the insulation material is configured in the second configuration, a direct line of sight between at least one said chamber wall of the deposition chamber and at least a portion of the evaporation source is established.
19 . The deposition system of claim 17 , wherein the insulation material is segmented into a plurality of segments.
20 . The deposition system of claim 19 , wherein two or more of the segments of insulation material are connected at hinged points.
21 . The deposition system of claim 17 , wherein the insulation material comprises at least one of carbon or a ceramic material.
22 . The deposition system of claim 17 , wherein the insulation material comprises at least one of graphite, carbon fiber, mullite, alumina, silica, or zirconia.
23 . The deposition system of claim 17 , wherein the insulation material comprises at least one of tantalum, niobium, or molybdenum.
24 . The deposition system of claim 17 , wherein the insulation material comprises a felt, a foam, a sol gel material, or a plurality of spaced-apart solid shields.
25 . The deposition system of claim 17 , further comprising one or more positioners for configuring the insulation material into the first configuration and the second configuration.
26 . The deposition system of claim 25 , wherein at least one positioner comprises an actuator.