Method of producing a semiconductor body
View Patent ↗A method of producing a semiconductor body includes providing a semiconductor wafer having at least two chip regions and at least one separating region arranged between the chip regions, wherein the semiconductor wafer includes a layer sequence, an outermost layer of which has at least within the separating region a transmissive layer transmissive to electromagnetic radiation, carrying out at least one of removing the transmissive layer within the separating region before starting a separation process with help of a laser, applying an absorbent layer within the separating region, wherein the absorbent layer remains in the separation region during a subsequent separation process with help of a laser, and increasing the absorption coefficient of the transmissive layer within the separating region, and subsequently separating the chip regions along the separating regions by a laser.
1. A method of producing a semiconductor body comprising:
providing a semiconductor wafer having at least two chip regions and at least one separating region arranged between the chip regions, wherein the semiconductor wafer comprises a layer sequence, an outermost layer of which has at least within the separating region a transmissive layer transmissive to electromagnetic radiation,
removing the transmissive layer within the separating region before starting a separation process with help of a laser,
applying an absorbent layer within the separating region, wherein the absorbent layer remains in the separation region during a subsequent separation process with help of a laser, and
subsequently separating the chip regions along the separating regions with a laser.
2. The method according to claim 1 , wherein the layer sequence has, within the chip regions, an active zone that generates electromagnetic radiation, and the separating region completely penetrates through the active zone.
3. The method according to claim 1 , wherein the transmissive layer is a passivation layer.
4. The method according to claim 1 , wherein the transmissive layer comprises one of oxides and nitrides.
5. The method according to claim 1 , wherein thickness of the transmissive layer is 3 nm to 500 nm.
6. The method according to claim 1 , wherein the transmissive layer completely covers side faces of the chip regions.
7. The method according to claim 1 , wherein the transmissive layer is removed within the separating region by an etching process.
8. The method according to claim 1 , wherein the absorbent layer on the transmissive layer comprises one selected from the group consisting of platinum, ruthenium, rhodium, osmium, iridium, zirconium, vanadium, tantalum, chromium, molybdenum, tungsten, carbides, tungsten carbide, titanium carbide, silicon carbide, silicon, nitrides, titanium nitride and tantalum nitride.
9. The method according to claim 1 , wherein each chip region has an optoelectronic thin-film semiconductor body.
10. The method according to claim 1 , wherein the separating region is a sawing trench.
11. The method according to claim 1 , wherein the absorbent layer has a melting and/or boiling point higher than the melting and/or boiling point of the transmissive layer.