Method of manufacturing a display device
View Patent ↗A method for manufacturing a display device is provided including forming a light emitting element by stacking in sequence a pixel electrode, light emitting layer and common electrode above a substrate, and forming an organic material pattern including a plurality of protrusions by evaporating an organic material above the common electrode, wherein the evaporation is performed under a reduced pressure in at a substrate temperature that is equal to or less than a glass transition temperature of the organic material.
1. A method for manufacturing a display device comprising:
forming a light emitting element by stacking in sequence a pixel electrode, light emitting layer and common electrode above a substrate; and
forming an organic material pattern including a plurality of protrusions by depositing an organic material after forming the common electrode;
wherein the deposition is performed under a reduced pressure at a substrate temperature that is equal to or less than a glass transition temperature of the organic material.
2. The method for manufacturing a display device according to claim 1 , wherein the substrate temperature range is 70° C. to 100° C.
3. The method for manufacturing a display device according to claim 1 , wherein the deposition is performed under a vacuum of 10 −5 Pa to 10 −7 Pa.
4. The method for manufacturing a display device according to claim 3 further comprising
forming a first protection film so as to cover a pattern including the plurality of protrusions.
5. The method for manufacturing a display device according to claim 4 , wherein the pattern of the plurality of protrusions has a spherical surface.
6. The method for manufacturing a display device according to claim 5 , wherein the pattern of the plurality of protrusions has a diameter of 0.1 μm or more and 10 μm or less.
7. The method for manufacturing a display device according to claim 6 , wherein the pattern of the plurality of protrusions has a height of 0.01 μm or more and 0.5 μm or less.
8. The method for manufacturing a display device according to claim 7 , wherein the pattern of the plurality of protrusions has a variation in diameter of 0.01 μm or more and 10 μm or less.
9. The method for manufacturing a display device according to claim 8 , wherein the pattern of the plurality of protrusions is formed with 100 or more and 1000000 or less protrusion patterns per pixel.
10. The method for manufacturing a display device according to claim 9 further comprising
forming a second protection film above the light emitting element before forming the pattern of the plurality of protrusions.
11. The method for manufacturing a display device according to claim 1 , wherein the organic material pattern is formed directly on a flat surface of the common electrode.
12. The method for manufacturing a display device according to claim 1 , wherein a plurality of protrusions are directly in contact with each other.
13. The method for manufacturing a display device according to claim 1 , further comprising:
forming a bank over the light emitting element, the bank having a hole,
wherein the plurality of protrusions are formed in the hole.
14. The method for manufacturing a display device according to claim 1 , wherein the deposition is performed by a vapor deposition method.
15. The method for manufacturing a display device according to claim 1 , wherein the deposition is performed so that the deposited organic material is spontaneously transformed to the plurality of protrusions.