DEVICES AND METHODS FOR PARAMETER MEASUREMENT
A thin-film, diaphragm based device is disclosed which can be used to perform an array of sensing and actuating operations where a very thin profile is desired, such as in millimeter, micrometer, or nanometer tight spaces.
1 . A device comprising:
a substrate; and
a diaphragm coupled to the substrate, wherein the diaphragm is a thin film capacitive transducer less than 1 mm thick.
2 . The device of claim 1 wherein the thin film capacitive transducer is between 10 μm and 20 μm thick.
3 . The device of claim 1 wherein the diaphragm is coupled to the substrate via an adhesive or other bonding method.
4 . The device of claim 1 further comprising a chamber structure between the diaphragm and the substrate.
5 . The device of claim 4 wherein:
the diaphragm is coupled to the substrate via an adhesive;
the chamber structure comprises a bonding pad around the perimeter of the chamber structure; and
the chamber structure is positioned between the diaphragm and the adhesive layer.
6 . The device of claim 1 wherein the substrate is electrically conductive.
7 . The device of claim 1 wherein the substrate and diaphragm are configured as a wireless resonant pressure sensor sized for implantation in a human artery.
8 . The device of claim 1 wherein the diaphragm is approximately 15 μm thick.
9 . The device of claim 1 wherein the substrate is approximately 50 μm thick.
10 . The device of claim 1 wherein the substrate is configured as an antenna.
11 . The device of claim 1 wherein the device is configured to measure pressure with a linear sensitivity of approximately four percent between 0 and 400 mm Hg.
12 . The device of claim 1 wherein the substrate and the diaphragm are biocompatible.
13 . The device of claim 1 wherein the device is configured as a pressure sensor.
14 . The device of claim 1 wherein the device is configured as an audio wave sensor.
15 . The device of claim 1 wherein the device is configured as a chemical sensor.
16 . The device of claim 1 wherein the device is configured as a biological sensor.
17 . The device of claim 1 wherein the device is configured as an optical sensor.
18 . The device of claim 1 wherein the device is configured as a pump.
19 . The device of claim 1 wherein the device is configured as a valve.
20 . The device of claim 1 further comprising a first electrode coupled to the diaphragm and a second electrode coupled to the substrate.
21 . A method of fabricating a thin film capacitive transducer, the method comprising;
providing a substrate;
providing a diaphragm, wherein the diaphragm is between 10 μm and 20 μm thick; and
coupling the diaphragm to the substrate.
22 . The method of claim 21 wherein coupling the diaphragm to the substrate comprises using adhesive to couple the diaphragm to the substrate.
23 . The method of claim 21 further comprising inserting a chamber structure between the diaphragm and the substrate before coupling the diaphragm to the substrate.
24 . The method of claim 23 wherein the diaphragm and chamber structure are constructed using photolithography.