PERFLUOROELASTOMER COMPOSITION, SEALING MATERIAL, AND METHOD FOR PRODUCING SAME
Provided are: a perfluoroelastomer composition which contains 100 parts by weight of a perfluoroelastomer containing a constituent unit derived from tetrafluoroethylene, a constituent unit derived from a perfluoro(alkyl vinyl ether) or a perfluoro(alkoxyalkyl vinyl ether) and a constituent unit derived from a nitrile group-containing perfluorovinyl ether, greater than or equal to 1 part by weight and less than 25 parts by weight of a fluororesin and a specific crosslinking agent; a sealing material which is formed of a crosslinked product of this perfluoroelastomer composition; and a method for producing this sealing material.
1 . A perfluoroelastomer composition comprising:
100 parts by weight of a perfluoroelastomer containing a constituent unit derived from tetrafluoroethylene, a constituent unit derived from a perfluoro(alkyl vinyl ether) or a perfluoro(alkoxyalkyl vinyl ether) and a constituent unit derived from a nitrile group-containing perfluorovinyl ether;
greater than or equal to 1 part by weight and less than 25 parts by weight of a fluororesin; and
at least one crosslinking agent selected from the group consisting of a bis(aminophenol) compound represented by general formula (1) below:
and a bis(aminothiophenol) compound represented by general formula (2) below:
and a tetraamine compound represented by general formula (3) below:
[in formulae (1) to (3), A represents SO 2 , O, C═O, an alkylene group having 1 to 6 carbon atoms, a perfluoroalkylene group having 1 to 10 carbon atoms, or a carbon-carbon bond directly bonding the two benzene rings to each other; and in formulae (1) and (2), a NH 2 group and an OH group or an SH group both located on the same benzene ring are adjacent to each other and the NH 2 group and the OH group or the SH group are in the meta- or para-position with respect to the group A].
2 . The perfluoroelastomer composition according to claim 1 , wherein a content of said crosslinking agent is 0.05 to 5 parts by weight relative to 100 parts by weight of said perfluoroelastomer.
3 . The perfluoroelastomer composition according to claim 1 , wherein a content of said fluororesin is 3 to 20 parts by weight relative to 100 parts by weight of said perfluoroelastomer.
4 . The perfluoroelastomer composition according to claim 1 , wherein the perfluoroelastomer composition contains no inorganic filler.
5 . A sealing material comprising a crosslinked product of the perfluoroelastomer composition according to claim 1 .
6 . The sealing material according to claim 5 , wherein the sealing material is used for a semiconductor manufacturing device.
7 . A method for producing a sealing material, the method comprising a step of crosslinking and molding the perfluoroelastomer composition according to claim 1 .
8 . The production method according to claim 7 , wherein said step of crosslinking and molding includes a step of crosslinking with an ionizing radiation.