Semiconductor device and method of manufacturing the semiconductor device
A semiconductor device for restraining snapback is provided. The semiconductor device includes IGBT and diode regions. In a view of n-type impurity concentration distribution along a direction from a front surface to a rear surface, a local minimum value of an n-type impurity concentration is located at a border between cathode and buffer regions. A local maximum value of n-type impurity concentration is located in the buffer region. At least one of the buffer and cathode regions includes a crystal defect region having crystal defects in a higher concentration than a region therearound. A peak of a crystal defect concentration in a view of crystal defect concentration distribution along the direction from the front surface to the rear surface is located in a region on the rear surface side with respect to a specific position having the n-type impurity concentration which is a half of the local maximum value.
1. A semiconductor device comprising:
a semiconductor substrate comprising an IGBT region and a diode region,
an emitter electrode provided on a front surface of the semiconductor substrate in the IGBT region;
an anode electrode provided on the front surface of the semiconductor substrate in the diode region; and
a rear electrode provided on a rear surface of the semiconductor substrate,
wherein
the IGBT region comprises:
an emitter region of an n-type and in contact with the emitter electrode;
a body region of a p-type and in contact with the emitter electrode;
an IGBT drift region of the n-type and separated from the emitter region by the body region;
a collector region of the p-type, separated from the body region by the IGBT drift region, and in contact with the rear electrode;
a gate insulating film in contact with the body region; and
a gate electrode facing the body region via the gate insulating film,
the diode region comprises:
an anode region of the p-type and in contact with the anode electrode;
a diode drift region of the n-type, bordering the anode region on a rear surface side, and connected to the IGBT drift region;
a buffer region of the n-type and bordering the diode drift region on the rear surface side; and
a cathode region of the n-type, bordering the buffer region on the rear surface side, and in contact with the rear electrode,
in a view of n-type impurity concentration distribution along a direction from the front surface to the rear surface, a local minimum value of an n-type impurity concentration is located at a border between the cathode region and the buffer region, and a local maximum value of the n-type impurity concentration is located in the buffer region,
a peak value of the n-type impurity concentration in the cathode region and the local maximum value are higher than the n-type impurity concentration in the diode drift region,
at least one of the buffer region and the cathode region comprises a crystal defect region in which crystal defects are distributed in a higher concentration than a region around the crystal defect region, and
a peak value of a crystal defect concentration in the view of crystal defect concentration distribution along the direction from the front surface to the rear surface is located in a region on the rear surface side with respect to a specific position having the n-type impurity concentration which is a half of the local maximum value, the specific position being located on a front surface side with respect to a position of the local maximum value.
2. The semiconductor device of claim 1 , wherein the peak value of the crystal defect concentration is located in the buffer region.
3. The semiconductor device of claim 2 , wherein the peak value of the crystal defect concentration is located in a region having the n-type impurity concentration which is higher than a half of the local maximum value.
4. A method of manufacturing the semiconductor device of claim 1 , the method comprising a step of implanting charged particles into the semiconductor substrate so as to form the crystal defect region.