Scanning microscopy system
A scanning microscopy system includes a photodetector and a scanning optical system that irradiates light onto a plurality of spots on an observed object to scan the observed object such that a positional relationship between an image of the observed object and the photodetector is maintained. The scanning optical system includes a confocal plate in which a plurality of apertures are placed in order in an intermediate image plane situated between the observed object and the photodetector and that includes a lens array having a plurality of lens elements that cover the plurality of apertures. The lens array individually demagnifies intermediate images of the plurality of spots that are formed or that have been formed in the plurality of apertures such that each of the plurality of spots is projected onto the photodetector at a magnification lower than a magnification at which the observed object is projected onto the photodetector.
1. A scanning microscopy system comprising:
a photodetector that has a plurality of light-receiving elements placed in order on an image surface; and
a scanning optical system that irradiates light onto a plurality of spots on an observed object to scan the observed object such that a positional relationship between an image of the observed object and the photodetector is maintained,
wherein the scanning optical system includes a confocal plate in which a plurality of apertures are placed in order in an intermediate image plane situated between the observed object and the photodetector and that includes a lens array having a plurality of lens elements that cover the plurality of apertures, and
wherein the lens array individually demagnifies intermediate images of the plurality of spots that are formed or that have been formed in the plurality of apertures such that each of the plurality of spots is projected onto the photodetector at a magnification lower than a magnification at which the observed object is projected onto the photodetector.
2. The scanning microscopy system according to claim 1 , wherein the plurality of lens elements are arranged on the object side of the plurality of apertures, and each of the plurality of lens elements has a positive power.
3. The scanning microscopy system according to claim 1 , wherein the plurality of lens elements are arranged on the image side of the plurality of apertures, and each of the plurality of lens elements has a negative power.
4. The scanning microscopy system according to claim 1 , wherein the scanning optical system further includes:
a first scanning unit that is arranged in an optical path between the confocal plate and the observed object and that changes positions at which the plurality of apertures are projected onto the observed object, and
a second scanning unit that is arranged in an optical path between the confocal plate and the photodetector and that changes positions at which the plurality of apertures are projected onto the photodetector.
5. The scanning microscopy system according to claim 1 , wherein the scanning optical system further includes a scanning unit that is arranged in a position at which an optical path between the confocal plate and the observed object and an optical path between the confocal plate and the photodetector intersect, and that changes positions at which the plurality of apertures are projected onto the observed object, and positions at which the plurality of apertures are projected onto the photodetector.
6. The scanning microscopy system according to claim 1 , wherein the scanning optical system further includes a driver that moves the confocal plate such that the plurality of apertures move in the intermediate image plane.
7. The scanning microscopy system according to claim 2 , wherein the scanning optical system further includes:
a first scanning unit that is arranged in an optical path between the confocal plate and the observed object and that changes positions at which the plurality of apertures are projected onto the observed object, and
a second scanning unit that is arranged in an optical path between the confocal plate and the photodetector and that changes positions at which the plurality of apertures are projected onto the photodetector.
8. The scanning microscopy system according to claim 2 , wherein the scanning optical system further includes a scanning unit that is arranged in a position at which an optical path between the confocal plate and the observed object and an optical path between the confocal plate and the photodetector intersect, and that changes positions at which the plurality of apertures are projected onto the observed object, and positions at which the plurality of apertures are projected onto the photodetector.
9. The scanning microscopy system according to claim 2 , wherein the scanning optical system further includes a driver that moves the confocal plate such that the plurality of apertures move in the intermediate image plane.
10. The scanning microscopy system according to claim 3 , wherein the scanning optical system further includes:
a first scanning unit that is arranged in an optical path between the confocal plate and the observed object and that changes positions at which the plurality of apertures are projected onto the observed object, and
a second scanning unit that is arranged in an optical path between the confocal plate and the photodetector and that changes positions at which the plurality of apertures are projected onto the photodetector.
11. The scanning microscopy system according to claim 3 , wherein the scanning optical system further includes a scanning unit that is arranged in a position at which an optical path between the confocal plate and the observed object and an optical path between the confocal plate and the photodetector intersect, and that changes positions at which the plurality of apertures are projected onto the observed object, and positions at which the plurality of apertures are projected onto the photodetector.
12. The scanning microscopy system according to claim 3 , wherein the scanning optical system further includes a driver that moves the confocal plate such that the plurality of apertures move in the intermediate image plane.
13. The scanning microscopy system according to claim 1 , wherein the scanning optical system further includes:
a light source, and
a lens array that is arranged in an optical path between the light source and the confocal plate and that collects light from the light source in the plurality of apertures.
14. A scanning microscopy system comprising:
a photodetector that has a plurality of light-receiving elements placed in order on an image surface; and
a scanning optical system that irradiates light onto a plurality of spots on an observed object to scan the observed object such that a positional relationship between an image of the observed object and the photodetector is maintained,
wherein the scanning optical system includes:
a first lens array that has a plurality of first lens elements each of which has a focal plane in an intermediate image plane situated between the observed object and the photodetector, and
a second lens array that is arranged in an optical path between the first lens array and the observed object and that has a plurality of second lens elements, and
wherein the second lens array is configured to demagnify intermediate images of the plurality of spots that are formed or that have been formed in the intermediate image plane such that each of the plurality of spots is projected onto the photodetector at a magnification lower than a magnification at which the observed object is projected onto the photodetector.
15. The scanning microscopy system according to claim 14 , wherein the second lens array is arranged such that the intermediate image plane is positioned away from the second lens array by a distance of one-half of a focal length of the second lens element.
16. The scanning microscopy system according to claim 14 , wherein the scanning optical system further includes a driver that moves the first lens array and the second lens array in directions perpendicular to optical axes of the first lens array and the second lens array, respectively, so that a relative positional relationship between the plurality of first lens elements and the plurality of second lens elements does not change.
17. The scanning microscopy system according to claim 15 , wherein the scanning optical system further includes a driver that moves the first lens array and the second lens array in directions perpendicular to optical axes of the first lens array and the second lens array, respectively, so that a relative positional relationship between the plurality of first lens elements and the plurality of second lens elements does not change.
18. The scanning microscopy system according to claim 13 , further comprising a second confocal plate that is different from the confocal plate and that is not provided with a lens array,
wherein the confocal plate and the second confocal plate are replaceable by each other.
19. The scanning microscopy system according to claim 18 , further comprising at least one third confocal plate that is different from the confocal plate,
wherein the confocal plate and the at least one third confocal plate are a plurality of confocal plates that have aperture diameters and aperture spacings different from one another or that have aperture diameters or aperture spacings different from one another, and the confocal plate and the at least one third confocal plate are replaceable by one another.