Electro-optical device and electronic apparatus
In an electro-optical device, a relay electrode (first electrode) includes a conduction section that overlaps the projection portion of an inter-layer insulation film, and the conduction section is exposed from the surface (flat surface) of the inter-layer insulation film. An insulation film which has a film thickness thinner than the height of the projection portion is formed on the surface (flat surface) of the inter-layer insulation film, and a pixel electrode is electrically conducted to the conduction section through the opening of the insulation film. In this case, since the opening is shallow, a large uneven part is hardly generated on the surface of the pixel electrode.
1. An electro-optical device comprising:
a substrate;
a projection portion that protrudes on a side opposite to the substrate on one surface side of the substrate;
a first electrode that includes a part which overlaps a tip end surface of the projection portion;
a pixel transistor between the substrate and the first electrode;
a first insulation film that is formed on a side of the first electrode that is opposite to the substrate and that includes a flat surface on a side of the first insulation film that is opposite to the substrate;
a second insulation film that is formed to have a film thickness thinner than a height of the projection portion on a side of the first insulation film that is opposite to the substrate; and
a second electrode that is formed on a side of the second insulation film that is opposite to the substrate;
wherein the first electrode is electrically conducted to the second electrode at a part, which overlaps the tip end surface of the projection portion in planar view, through a part at which the first insulation film and the second insulation film are open,
wherein the second electrode is a pixel electrode, and the first electrode is a relay electrode which is electrically connected to the pixel transistor, and
wherein the pixel electrode includes at least
a first transparent conductive film, which is laminated on the side of the second insulation film that is opposite to the substrate, and
a refractive index adjusting dielectric film, which is laminated on a side of the first transparent conductive film that is opposite to the substrate.
2. The electro-optical device according to claim 1 , wherein the second insulation film includes boron-doped silicate glass.
3. The electro-optical device according to claim 1 , further comprising:
wherein the pixel electrode further includes a second transparent conductive film, which is laminated on a side of the refractive index adjusting dielectric film that is opposite to the substrate.
4. The electro-optical device according to claim 3 , further comprising:
a light shading layer that is provided between the substrate and the pixel electrode and is configured to define a transparent area of the pixel electrode,
wherein the pixel electrode includes a connection section that electrically connects the first transparent conductive film to the second transparent conductive film in a location which overlaps the light shading layer in a planar view.
5. The electro-optical device according to claim 4 ,
wherein the connection section is a part at which the first transparent conductive film and the second transparent conductive film project from an end portion of the refractive index adjusting dielectric film and come into contact with each other.
6. The electro-optical device according to claim 5 ,
wherein the first transparent conductive film and the second transparent conductive film are provided to be the same shape.
7. The electro-optical device according to claim 5 ,
wherein the connection section is provided to surround the periphery of the refractive index adjusting dielectric film.
8. An electronic apparatus comprising the electro-optical device according to claim 1 .
9. The electronic apparatus according to claim 8 , comprising:
a light source section that emits illumination light which is irradiated into the electro-optical device; and
a projection optical system that projects light which is modulated by the electro-optical device.