Semiconductor integrated circuit device
View Patent ↗A semiconductor integratd circuit device includes fuse elements formed on an element isolation insulating film, and an insulating film, an interlayer insulating film and a silicon nitride film successively formed over the fuse elements. An opening region extends through the silicon nitride film into the interlayer insulating film above the fuse elements, and openings formed in the interlayer insulating film are positioned on both sides of middle portions of the fuse elements. The openings facilitate blowing off of the insulating film during laser cutting of the fuse elements, reducing physical damage to the element isolation insulating film under the fuse elements.
1. A semiconductor integrated circuit device, comprising:
a semiconductor substrate;
an element isolation insulating film disposed on a surface of the semiconductor substrate;
fuse elements disposed in spaced-apart side-by-side relationship on the element isolation insulating film, each fuse element having two opposite end portions interconnected by a middle portion;
an insulating film disposed on the fuse elements;
an interlayer insulating film disposed on the insulating film;
a silicon nitride film disposed on the interlayer insulating film;
an opening region extending through the silicon nitride film into the interlayer insulating film at a location above the fuse elements; and
openings formed in the interlayer insulating film at a bottom of the opening region, the openings being positioned on both sides of the middle portions of the fuse elements, adjacent openings of adjacent fuse elements being spaced apart and separated from one another, and plural openings being positioned on each side of the middle portions of the fuse elements.
2. A semiconductor integrated circuit device according to claim 1 ; wherein the openings have a square shape.