Overcoat compositions and methods for photolithography
Topcoat compositions are provided that are suitably applied above a photoresist composition. Preferred topcoat compositions comprise a first polymer that comprises (i) first units comprising a nitrogen-containing moiety that comprises an acid-labile group; and (ii) second units that (1) comprise one or more hydrophobic groups and (2) are distinct from the first units.
1. A method for processing a photoresist composition, comprising:
(a) applying a layer of a photoresist composition on a substrate;
(b) applying over the photoresist layer a layer of a second composition to form a topcoat layer, the second composition comprising
i) a first polymer comprising:
first units comprising a nitrogen-containing moiety that comprises an acid-labile group;
second units that (1) comprise one or more hydrophobic groups and (2) are distinct from the first units; and
third units that (1) comprise one or more hydrophobic groups and (2) are distinct from the first and second units,
wherein the one or more hydrophobic groups of the second and third units each comprise three or more carbon atoms; and
ii) a second polymer that (1) comprises acid-labile groups and (2) is distinct from the first polymer;
(c) patternwise exposing the topcoat layer and photoresist layer to activating radiation; and
(d) developing the exposed photoresist composition layer to provide a photoresist relief image.
2. The method of claim 1 wherein acid-labile groups of a nitrogen-containing moiety of a first polymer of the topcoat layer undergo reaction during the exposing and a post-exposure thermal treatment prior to the developing to provide an amine linked to the first polymer.
3. The method of claim 1 wherein the exposed photoresist and topcoat layers are developed with an organic solvent composition that selectively removes unexposed portions of the photoresist composition layer to provide the photoresist relief image.
4. The method of claim 1 wherein the nitrogen-containing moiety is a carbamate.
5. The method of claim 1 wherein the first units further comprise a hydrophobic group.
6. The method of claim 1 wherein the first units further comprise an optionally substituted alkyl having 3 or more carbon atoms.
7. The method of claim 1 wherein the first units further comprise an optionally substituted alkyl having 4 or more carbon atoms.
8. The method of claim 1 wherein the first units further comprise an optionally substituted alkyl having 5 or more carbon atoms.
9. The method of claim 1 wherein the first polymer is present in the second composition in an amount of 0.5 to 5 weight percent based on total solids of the second composition.
10. The method of claim 1 wherein the first polymer is present in the second composition in an amount of 1 to 3 weight percent based on total solids of the second composition.
11. The method of claim 1 wherein the second composition is free of acid generator compounds.
12. A coated substrate comprising:
a layer of a photoresist composition; and
a second composition disposed over the photoresist composition, the second composition comprising:
i) a first polymer comprising:
first units comprising a nitrogen-containing moiety that comprises an acid-labile group;
second units that (1) comprise one or more hydrophobic groups and (2) are distinct from the first units; and
third units that (1) comprise one or more hydrophobic groups and (2) are distinct from the first and second units,
wherein the one or more hydrophobic groups of the second and third units each comprise three or more carbon atoms; and
ii) a second polymer that (1) comprises acid-labile groups and (2) is distinct from the first polymer.
13. The substrate of claim 12 wherein the first polymer is present in the second composition in an amount of 0.5 to 5 weight percent based on total solids of the second composition.
14. The substrate of claim 12 wherein the first polymer is present in the second composition in an amount of 1 to 3 weight percent based on total solids of the second composition.
15. The substrate of claim 12 wherein the second composition is free of acid generator compounds.
16. The substrate of claim 12 wherein the second units and third units each comprise hydrophobic groups having 5 or more carbon atoms.
17. The substrate of claim 12 wherein the second units and third units each comprise hydrophobic groups having 6 or more carbon atoms.
18. The substrate of claim 12 wherein the second units and third units each comprise hydrophobic groups having 8 or more carbon atoms.