Methods for improving adhesion on dielectric substrates
View Patent ↗Various embodiments described herein provide for substrate structures including uniform plating seed layers, and that provide favorable adhesion on dielectric substrate layers. According to some embodiments, a methods for forming a magnetic recording pole is provided comprising: forming an insulator layer; forming a trench in the insulator layer; forming an amorphous seed layer over the insulator layer; forming an adhesion layer over the amorphous seed layer, the adhesion layer comprising a physical vapor deposited (PVD) noble metal; forming a plating seed layer over the adhesion layer, the plating seed layer comprising chemical vapor deposited (CVD) Ru; and forming a magnetic material layer over the plating seed layer.
1. A method for forming magnetic recording pole, comprising:
forming an insulator layer;
forming a trench in the insulator layer;
forming an amorphous seed layer over the insulator layer;
forming an adhesion layer over the amorphous seed layer, the adhesion layer comprising a physical vapor deposited (PVD) noble metal;
forming a plating seed layer over the adhesion layer, the plating seed layer comprising chemical vapor deposited (CVD) Ru; and
forming a magnetic material layer over and in contact with the plating seed layer.
2. The method of claim 1 , wherein forming the magnetic material layer involves a plating process.
3. The method of claim 1 , wherein forming the trench in the insulator layer comprises removing a portion of the insulator.
4. The method of claim 3 , wherein forming the trench in the insulator layer further comprises depositing a surface treatment material on the insulator layer.
5. The method of claim 1 , wherein forming the amorphous seed layer over the insulator layer comprises depositing the amorphous seed layer over the trench and over areas of the insulator layer extending beyond the trench.
6. The method of claim 1 , wherein forming the amorphous seed layer over the insulator layer comprises depositing a metal film over the insulator layer and oxidizing the metal film.
7. The method of claim 1 , wherein the PVD noble metal comprises Ru, Rh, Pd, Ag, Os, Ir, Pt, or Au.
8. The method of claim 1 , wherein the amorphous seed layer comprises a metal oxide, a metal nitride, or metal alloy.
9. The method of claim 1 , wherein the amorphous seed layer comprises TaO x , TiO x , AlO x , SiO x , WO x , HfO x , NbO x , or ZrO x .
10. The method of claim 1 , wherein the chemical vapor deposited (CVD) Ru comprises RuO 4 .
11. The method of claim 1 , wherein the insulator layer comprises alumina.
12. The method of claim 1 , wherein the magnetic material layer comprises NiFe or CoFe.