IP Library Granted Patent US 9,912,121
Granted Patent B2
US 9,912,121 · App. 15/149,595 · Granted Mar 6, 2018

Gap distributed Bragg reflectors

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Quick Facts
Patent No.
US 9,912,121
App. No.
15/149,595
Granted
Mar 6, 2018
Kind
B2
Abstract

A device includes one or more reflector components. Each reflector component comprises layer pairs of epitaxially grown reflective layers and layers of a non-epitaxial material, such as air. Vias extend through at least some of the layers of the reflector components. The device may include a light emitting layer.

Claims (37)

1. A sensor comprising:

a plurality of layer pairs, each layer pair comprising:

a reflective layer; and

an interstitial gap, each reflective layer having a first thickness and a first index of refraction and each interstitial gap having a second thickness and a second index of refraction, the first and second thicknesses and the first and second indices of refraction selected to reflect incident light traveling along a first direction, the layer pairs arranged such that each interstitial gap is disposed between two reflective layers, the plurality of layer pairs forming a distributed Bragg reflector (DBR); and

at least one opening configured to allow entry of an analyte into the interstitial gaps within the DBR.

2. The sensor of claim 1 , wherein the sensor is a monolithic structure that includes a light emitting device configured to generate light that is directed toward by the DBR.

3. The sensor of claim 2 , further comprising an additional DBR, the light emitting device disposed between the DBR and the additional DBR.

4. The sensor of claim 1 , wherein the sensor is a monolithic structure that includes a photodetector configured to detect light reflected or transmitted by the DBR.

5. The sensor of claim 1 , wherein the sensor is a monolithic structure that includes an additional DBR and a light emitting device disposed between the DBR and the additional DBR.

6. The sensor of claim 5 , wherein the light emitting device comprises a vertical cavity surface emitting laser.

7. The sensor of claim 1 , wherein air or a vacuum is present within the interstitial gaps before entry of the analyte.

8. The sensor of claim 1 , wherein the reflective layers comprise GaN.

9. The sensor of claim 1 , wherein the reflective layers are epitaxial layers.

10. A system comprising:

a sensor, comprising:

a plurality of layer pairs, each layer pair comprising:

a reflective layer; and

an interstitial gap, each reflective layer having a first thickness and a first index of refraction and each interstitial gap having a second thickness and a second index of refraction, the first and second thicknesses and the first and second indices of refraction selected to reflect incident light traveling along a first direction, the layer pairs arranged such that each interstitial gap is disposed between two reflective layers, the layer pairs forming a distributed Bragg reflector (DBR); and

at least one opening configured to allow entry of an analyte into the interstitial gaps;

a light emitting device configured to generate light directed toward the DBR; and

a photodetector configured to sense light reflected or transmitted by the DBR and to generate a signal based on the sensed light.

11. The system of claim 10 , further comprising a processor configured to receive the signal and to detect a presence of the analyte based on the signal.

12. The system of claim 11 , wherein the processor is configured to identify the analyte based on the signal.

13. The system of claim 11 , wherein the processor is configured to determine a characteristic of the analyte based on the signal.

14. A method comprising:

exposing a sensor to an analyte, the sensor including:

a plurality of layer pairs, each layer pair comprising:

an interstitial gap, each reflective layer having a first thickness and a first index of refraction and each interstitial gap having a second thickness and a second index of refraction, the first and second thicknesses and the first and second indices of refraction selected to reflect incident light traveling along a first direction, the layer pairs arranged such that each interstitial gap is disposed between two reflective layers, the layer pairs forming a distributed Bragg reflector (DBR); and

at least one opening fluidically coupled to the interstitial gaps;

allowing the analyte to enter the interstitial gaps through the opening, entry of the analyte changing optical properties of the DBR;

sensing light transmitted or reflected by the DBR; and

detecting a presence of the analyte based on the sensed light.

15. The method of claim 14 , further comprising identifying the analyte based on the sensed light.

16. The method of claim 15 , further comprising determining at least one characteristic of the analyte based on the sensed light.

17. The method of claim 16 , wherein the at least one characteristic comprises one or more of temperature, pressure and concentration of the analyte.

18. The method of claim 14 , wherein the sensed light indicates a change in refractive index of the sensor when the analyte is present in the interstial gaps.

19. The method of claim 14 , further comprising generating light directed toward the DBR.

Assignments (9)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073842/0479 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →