Method for manufacturing light-emitting element
A method for manufacturing a light-emitting element, including steps of: providing a wafer-level element including a wafer and a light-emitting stack on the wafer, wherein the wafer including an upper surface and a bottom surface, and light-emitting stack is formed on the upper surface of the wafer; forming a light-emitting stack on the upper surface of the wafer; cutting the wafer from one of the bottom surface or the top surface of the wafer by a water-jet laser having a first beam size; cutting the wafer from the other one of the bottom surface or the upper surface of the wafer by the water-jet laser having a second beam size; and dividing the wafer-level element wafer and the light-emitting stack into a plurality of light-emitting dies.
1. A method for manufacturing a light-emitting element, comprising
steps of:
providing a wafer-level element comprising a wafer and a light-emitting stack on the wafer, wherein the wafer comprises an upper surface and a bottom surface, and the light-emitting stack is formed on the upper surface of the wafer;
cutting the wafer from one of the bottom surface or the upper surface of the wafer by a water-jet laser having a first beam size to form a first arc portion of the wafer, wherein the first arc portion comprises a first negative curvature;
cutting the wafer from the other one of the bottom surface or the upper surface of the wafer by the water-jet laser having a second beam size to form a second arc portion of the wafer, wherein the second arc portion comprises a second negative curvature, wherein the first arc portion is closed to the bottom surface, and the second arc portion is closed to the upper surface;
and
dividing the wafer-level element into a plurality of light-emitting dies
wherein one of the light-emitting dies comprises a substrate having the first arc portion and the second arc portion, and
wherein a reflective structure is formed on the bottom surface and the first arc portion conformably before dividing the wafer-level element into the plurality of light-emitting dies.
2. The method according to claim 1 , further comprising forming a plurality of trenches for dividing the light-emitting stack into multiple light-emitting blocks and exposing the upper surface of the wafer before cutting the wafer by the water jet laser,
wherein the first arc portion and the second arc portion are formed in the wafer under the light-emitting blocks.
3. The method according to claim 1 , wherein the wafer comprises a plurality of thinned portions after being cut by the water-jet laser, and the method further comprises breaking the thinned portions to divide the wafer-level element into the plurality of light-emitting elements.
4. The method according to claim 2 , wherein the step of dividing the wafer-level element into a plurality of light-emitting dies comprises continuing cutting the wafer by the water-jet laser to penetrate through the wafer completely.
5. The method according to claim 1 , wherein the water-jet laser comprises a water jet and a laser traveling in the water jet.
6. The method according to claim 1 , further comprising cutting the wafer from one of the bottom surface or the top surface of the wafer to form a third arc portion by the water-jet laser having a third beam size different from the first beam size or the second beam size.
7. The method according to claim 6 , wherein the first beam size is bigger than one of the second beam size and the third beam size.