Solar cell and method of manufacturing the same
Disclosed is a solar cell including a semiconductor substrate, a conductive area including a first conductive area and a second conductive area formed on one surface of the semiconductor substrate, a passivation film formed on the conductive area, the passivation film having a contact hole, a protective film formed on the conductive area inside the contact hole, the protective film being formed on at least one of at least a portion of an inner side surface of the contact hole and the passivation film, and an electrode electrically connected to the conductive area through the contact hole with the protective film interposed therebetween.
1. A solar cell comprising:
a semiconductor substrate;
a conductive area formed on a surface of the semiconductor substrate;
a passivation film including a first layer directly formed on the conductive area and having a first contact hole and a second layer directly formed on the first layer and having a second contact hole having a size smaller than a size of the first contact hole;
an electrode electrically connected to the conductive area through the first and second contact holes, wherein the electrode comprises a first electrode region filled in the first contact hole to form an empty space between the first layer and the electrode and a second electrode region filled in the second contact hole not to form an empty space between the second layer and the electrode; and
a silicon oxide film formed on an interface between the conductive area and the first electrode region thereby preventing a direct contact of the conductive area and the first electrode region.
2. The solar cell according to claim 1 , wherein the conductive area comprises a first conductive area and a second conductive area formed on the surface of the semiconductor substrate, and
wherein the solar cell further comprises a barrier area formed on the surface of the semiconductor substrate, and located between the first conductive area and the second conductive area.
3. The solar cell according to claim 1 , wherein the electrode further comprises a third electrode region that is outside of the first and second contact holes, and
wherein the third electrode region is formed on the first and second layers so that the third electrode region overlaps the first and second layers.
4. The solar cell according to claim 1 , wherein the empty space is formed only in the first layer.