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App. No. 15/156,421 · Confirmation No. 4171

TPIR APPARATUS FOR MONITORING TUNGSTEN HEXAFLUORIDE PROCESSING TO DETECT GAS PHASE NUCLEATION, AND METHOD AND SYSTEM UTILIZING SAME

Applicant: Entegris, Inc.
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Quick Facts
App. No.
15/156,421
Filed
2016-05-17
Pub. No.
US20160281238A1
Art Unit
1712