Electronic device, quantum interference device, atomic oscillator, magnetocardiograph, oscillator, electronic apparatus, moving object, and method of manufacturing electronic device
An atomic oscillator includes a base, an atomic cell unit that is disposed on the base, a lid that constitutes an internal space accommodating the atomic cell unit together with the base, and a getter material that is disposed on the base with a gap with respect to the base in the internal space.
1. An electronic device comprising:
a base;
a functional component that is disposed on the base, the functional component including one of an atomic cell and a vibrator;
a lid that is provided over the functional component, the base and the lid constituting an internal space accommodating the functional component;
a getter material that is disposed in the internal space above the base and that is spaced apart from the base; and
a heater that is disposed in the internal space above the base and that is spaced apart from the base, the heater being configured to heat the getter material.
2. The electronic device according to claim 1 ,
wherein the getter material and the heater are stacked on each other.
3. The electronic device according to claim 2 ,
wherein the getter material is configured with two layers, and the heater is present between the two layers of the getter material.
4. The electronic device according to claim 1 , further comprising:
a conductive terminal that is disposed in the internal space and that connects the heater and the base to each other.
5. The electronic device according to claim 4 , wherein the conductive terminal includes copper.
6. The electronic device according to claim 1 ,
wherein one of the base and the lid includes a hole passing from an inside to an outside of the internal space, and
wherein the hole is closed by a sealing material.
7. The electronic device according to claim 1 , further comprising:
a temperature adjustor that is configured to adjust a temperature of the functional component.
8. A quantum interference device comprising the electronic device according to claim 1 ; and
an external terminal that is disposed on an external surface of the base.
9. A quantum interference device comprising the electronic device according to claim 2 ; and
an external terminal that is disposed on an external surface of the base.
10. The quantum interference device according to claim 8 ,
wherein the functional component includes the atomic cell that accommodates metal atoms, a light source that emits resonating light to the metal atoms, and a light detector detecting passed light that has passed through the atomic cell.
11. The quantum interference device according to claim claim 8 , further comprising:
a support member that is disposed in the internal space between the functional component and the base so as to fix the functional component to the base.
12. The quantum interference device according to claim 8 ,
wherein a distance between the base and the heater is smaller than a distance between the base and the functional component.
13. An atomic oscillator comprising:
the quantum interference device according to claim 8 ; and
an excitation light controller that is configured to control a frequency of a light emitted from a light source toward the functional component.
14. An atomic oscillator comprising:
the quantum interference device according to claim 10 ; and
an excitation light controller that is configured to control a frequency of a light emitted from a light source toward the functional component.
15. An oscillator comprising:
the electronic device according to claim 1 ,
wherein the functional component includes the vibrator and an IC chip having a driving circuit.
16. A moving object comprising:
the electronic device according to claim 1 ; and
a movable body that houses the electronic device.
17. A method of manufacturing an electronic device, the method comprising:
providing a base, a lid, a functional component, a getter material, and a heater, the functional component including one of an atomic cell and a vibrator;
providing a hole in one of the base and the lid;
forming an internal space by fixing the base to the lid so as to accommodate the functional component, the getter material, and the heater in the internal space, the functional component being disposed on the base;
sealing the internal space by closing the hole with a sealing material; and
activating the getter material by heat generated by the heater,
wherein the getter material is disposed in the internal space above the base and is spaced apart from the base, and
the heater is disposed in the internal space above the base and is spaced apart from the base.