Gain equalization for multiple axis magnetic field sensing

1. A magnetic field sensor comprising:

a plurality of magnetic field sensing elements including:

a first magnetic field sensing element arranged to have a maximum response to an external magnetic field and a reference magnetic field along a first axis and having an output that provides a first signal representing the magnetic fields as detected by the first magnetic field sensing element; and

a second magnetic field sensing element arranged to have a maximum response to the external magnetic field and the reference magnetic field along a second axis and having an output that provides a second signal representing the magnetic field as detected by the second magnetic field sensing element;

a coil structure configured to generate the reference magnetic field when a current passes through the coil structure;

a memory containing at least one reference gain value comprising a relative gain between the first and second magnetic field sensing elements;

a gain equalization circuit coupled to receive the first signal and the second signal and configured to:

extract a first reference portion of the first signal representing the reference field;

extract a second reference portion of the second signal representing the reference field;

measure a first gain of the first reference portion;

measure a second gain of the second reference portion;

compare the first gain to the at least one reference gain;

compare the second gain to the at least one reference gain;

adjust the first gain based on the comparison of the first gain and the reference gain value so that the first gain is normalized to an expected value; and

adjust the second gain based on the comparison of the second gain and the reference gain value so that the second gain is normalized to the expected value.

2. The structure of claim 1 wherein the first and second magnetic field sensing elements comprise vertical Hall effect elements.

3. The structure of claim 1 wherein the first magnetic field sensing element comprises a planar Hall effect element and the second magnetic field sensing element comprises a vertical Hall effect element.

4. The structure of claim 1 wherein the plurality of magnetic field sensing elements further includes a third magnetic field sensing element arranged to have a maximum response to the magnetic field along a third axis.

5. The structure of claim 4 wherein the first magnetic field sensing element comprises a planar Hall effect element, and the second and third magnetic field sensing elements comprise vertical Hall effect elements.

6. The structure of claim 1 wherein at least one of the plurality of magnetic field sensing elements comprises a magnetoresistance element.

7. The structure of claim 1 wherein the first magnetic field sensing element comprises a first differential magnetic field sensing element and the second magnetic field sensing element comprises a second differential magnetic field sensing element, wherein the coil structure is configured to generate differential magnetic fields on the first and second differential magnetic field sensing elements.

8. The structure of claim 7 wherein the first differential magnetic field sensing element comprises two vertical Hall elements and the second differential magnetic field sensing element comprises two vertical Hall elements.

9. The structure of claim 7 wherein the first differential magnetic field sensing element comprises two planar Hall elements and the second differential magnetic field sensing element comprises two vertical Hall elements.

10. The structure of claim 7 wherein the plurality of magnetic field sensing elements further includes a third magnetic field sensing element arranged to have a maximum response to the magnetic field along a third axis, wherein the third magnetic field sensing element comprises a third differential magnetic field sensing element.

11. The structure of claim 10 wherein the first differential magnetic field sensing element comprises two planar Hall effect elements, the second differential magnetic field sensing element comprises two vertical Hall effect elements, and the third differential magnetic field sensing element comprises two vertical Hall effect elements.

12. The structure of claim 11 wherein the coil structure comprises windings a first direction around the a first one of the two planar Hall effect elements and windings in a second opposite direction around a second one of the two planar Hall effect elements.

13. The magnetic field sensor of claim 11 further comprising a coil driver circuit coupled to the coil structure;

wherein the coil driver circuit is configured to generate a coil drive signal as an alternating current (AC) signal having a frequency substantially different than a frequency of the external magnetic field, and the first, second, and third signals represent; and

wherein the gain equalization circuit comprises:

an external signal filter to extract a portion of the first and second signals representing the external magnetic field; and

a reference signal filter to extract the first and second reference portions.

14. The structure of claim 1 wherein the coil structure comprises a continuous length of conductive material.

15. The structure of claim 1 wherein the coil structure comprises multiple coils each configured to generate a magnetic field on one or more of the magnetic field sensing elements when a current passes through the coil, wherein the currents passing through the multiple coils are matched.

16. The structure of claim 15 wherein the multiple coils are coupled in series.

17. The structure of claim 1 wherein the coil structure is configured to generate a first magnetic field substantially parallel to the first axis and a second magnetic field substantially parallel to the second axis.

18. The magnetic field sensor of claim 1 wherein the reference gain value comprises a ratio of an absolute gain associated with the first magnetic field sensing element and an absolute gain associated with the second magnetic field sensing element.

19. The magnetic field sensor of claim 1 wherein the coil structure comprises multiple coils coupled to a coil driver circuit so that each of the multiple coils receives a current of the same magnitude.