Heat shield ring for high growth rate EPI chamber
A heat shield assembly for an epitaxy chamber is described herein. The heat shield assembly has a heat shield member and a preheat member. The heat shield member is disposed on the preheat member. The heat shield member has a cutout portion that exposes a portion of the preheat member. The preheat member has a recessed portion to receive the heat shield member.
1. A heat shield assembly, comprising:
an annular heat shield member having a gap that subtends an angle of the heat shield member, wherein the edges of the gap are parallel to a radius of the heat shield member that bisects the angle; and
an annular preheat member with a recessed portion that receives the heat shield member.
2. The heat shield assembly of claim 1 , wherein the gap has two rounded outer corners.
3. The heat shield assembly of claim 2 , wherein the rounded corners are circular.
4. The heat shield assembly of claim 1 , wherein an inner radius of the preheat member is larger than an inner radius of the heat shield member.
5. The heat shield assembly of claim 1 , wherein the preheat member has a rim portion that surrounds the heat shield member.
6. The heat shield assembly of claim 5 , wherein the preheat member or the heat shield member has reduced contact features.
7. The heat shield assembly of claim 6 , wherein the reduced contact features are ridges.
8. The heat shield assembly of claim 7 , wherein the preheat member has a gap from an outer radius to an inner radius thereof.
9. The heat shield assembly of claim 5 , wherein the preheat member and the heat shield member both have angled contact surfaces.
10. A heat shield assembly, comprising:
an annular heat shield member having a gap that subtends an angle of the heat shield member, wherein the edges of the gap are parallel to a radius of the heat shield member that bisects the angle; and
an annular preheat member with a recessed portion that receives the heat shield member and a gap from an outer radius to an inner radius of the preheat member.
11. The heat shield assembly of claim 10 , wherein the preheat member or the heat shield member has reduced contact features.
12. The heat shield assembly of claim 10 , wherein the preheat member and the heat shield member both have angled contact surfaces.
13. The heat shield assembly of claim 11 , wherein the reduced contact features are ridges.
14. The heat shield assembly of claim 13 , wherein the preheat member has a rim portion that surrounds the heat shield member.
15. A heat shield assembly, comprising:
an annular heat shield member having a gap that subtends an angle of the annular member, the gap having edges parallel to a radius of the heat shield member that bisects the subtended by the gap, wherein the gap has rounded corners; and
an annular preheat member with a recessed portion that receives the heat shield member, wherein the preheat member has a rim portion that surrounds the heat shield member.
16. The heat shield assembly of claim 15 , wherein an inner radius of the preheat member is larger than an inner radius of the heat shield member.
17. The heat shield assembly of claim 15 , wherein the rounded corners are circular.
18. The heat shield assembly of claim 15 , wherein the preheat member or the heat shield member has reduced contact features, and wherein the reduced contact features are ridges.
19. The heat shield assembly of claim 15 , wherein the preheat member and the heat shield member both have angled contact surfaces.