Optical element arrangements for varying beam parameter product in laser delivery systems
View Patent ↗In various embodiments, laser delivery systems feature one or more optical elements for receiving a radiation beam and altering the spatial power distribution thereof, a lens manipulation system for changing a position of at least one optical element within the path of the radiation beam, and a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on a workpiece.
1. A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
a collimating lens for collimating the radiation beam;
a focusing lens for receiving the collimated beam and focusing the beam toward the workpiece;
disposed between the beam source and the collimating lens, an optical element for receiving the radiation beam and altering the spatial power distribution thereof;
a lens manipulation system for changing a position of the optical element within a path of the radiation beam; and
a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece,
wherein the optical element is positioned transversely off-center within the path of the radiation beam.
2. The system of claim 1 , wherein the optical element comprises a lens having (i) a first surface having the shape of a truncated cone, and (ii) opposite the first surface, a second surface that is substantially planar.
3. The system of claim 2 , wherein the first surface faces the beam source.
4. The system of claim 2 , wherein the first surface faces away from the beam source.
5. The system of claim 1 , wherein the optical element comprises a lens having (i) a first surface having the shape of a truncated sphere, and (ii) opposite the first surface, a second surface that is substantially planar.
6. The system of claim 5 , wherein the first surface faces the beam source.
7. The system of claim 5 , wherein the first surface faces away from the beam source.
8. The system of claim 1 , wherein the optical element comprises a meniscus lens.
9. The system of claim 8 , wherein the meniscus lens is a positive meniscus lens.
10. The system of claim 8 , wherein the meniscus lens is a negative meniscus lens.
11. The system of claim 1 , wherein the optical element comprises at least one of fused silica or zinc sulfide.
12. The system of claim 1 , further comprising a second optical element disposed between the focusing lens and the workpiece, wherein the lens manipulation system is configured to change a position of the second optical element within the path of the radiation beam.
13. The system of claim 12 , wherein the second optical element comprises a lens having (i) a first surface having the shape of a truncated cone, and (ii) opposite the first surface, a second surface that is substantially planar.
14. The system of claim 12 , wherein the second optical element comprises a lens having (i) a first surface having the shape of a truncated sphere, and (ii) opposite the first surface, a second surface that is substantially planar.
15. The system of claim 12 , wherein the second optical element comprises a meniscus lens.
16. The system of claim 15 , wherein the meniscus lens is a positive meniscus lens.
17. The system of claim 15 , wherein the meniscus lens is a negative meniscus lens.
18. The system of claim 1 , wherein the beam source comprises:
a beam emitter emitting a plurality of discrete beams;
focusing optics for focusing the plurality of beams onto a dispersive element;
a dispersive element for receiving and dispersing the received focused beams; and
a partially reflective output coupler positioned to receive the dispersed beams, transmit a portion of the dispersed beams therethrough as the radiation beam, and reflect a second portion of the dispersed beams back toward the dispersive element,
wherein the radiation beam is composed of multiple wavelengths.
19. The system of claim 18 , wherein the dispersive element comprises a diffraction grating.
20. The system of claim 1 , wherein the controller is configured to control the lens manipulation system based on one or properties of the workpiece.
21. The system of claim 20 , wherein the one or more properties of the workpiece comprise at least one of a distance to the workpiece, a composition of the workpiece, or a topography of the workpiece.
22. A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
a collimating lens for collimating the radiation beam;
a focusing lens for receiving the collimated beam and focusing the beam toward the workpiece;
disposed between the beam source and the collimating lens, first and second optical elements for receiving the radiation beam and altering the spatial power distribution thereof;
a lens manipulation system for changing at least one of (i) a position of the first optical element within a path of the radiation beam, (ii) a position of the second optical element within the path of the radiation beam, or (iii) a distance between the first and second optical elements; and
a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece,
wherein at least one of the first optical element or the second optical element comprises a phase plate.
23. The system of claim 22 , wherein the lens manipulation system is configured to change the distance between the first and second optical elements within the range of approximately 0 mm to approximately 20 mm.
24. The system of claim 22 , wherein the beam source comprises:
a beam emitter emitting a plurality of discrete beams;
focusing optics for focusing the plurality of beams onto a dispersive element;
a dispersive element for receiving and dispersing the received focused beams; and
a partially reflective output coupler positioned to receive the dispersed beams, transmit a portion of the dispersed beams therethrough as the radiation beam, and reflect a second portion of the dispersed beams back toward the dispersive element,
wherein the radiation beam is composed of multiple wavelengths.
25. The system of claim 24 , wherein the dispersive element comprises a diffraction grating.
26. The system of claim 22 , wherein the lens manipulation system is configured to change the distance between the first and second optical elements within the range of approximately 2 mm to approximately 50 mm.
27. The system of claim 22 , wherein at least one of the first optical element or the second optical element comprises at least one of fused silica or zinc sulfide.
28. The system of claim 22 , wherein the controller is configured to control the lens manipulation system based on one or properties of the workpiece.
29. The system of claim 28 , wherein the one or more properties of the workpiece comprise at least one of a distance to the workpiece, a composition of the workpiece, or a topography of the workpiece.
30. The system of claim 22 , wherein the lens manipulation system is configured to fixedly position at least one of the first optical element or the second optical element transversely off-center within the path of the radiation beam.
31. The system of claim 22 , wherein at least one of the first optical element or the second optical element is positioned transversely off-center within the path of the radiation beam.
32. The system of claim 22 , wherein each of the first optical element and the second optical element comprises a phase plate.
33. A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
a collimating lens for collimating the radiation beam;
a focusing lens for receiving the collimated beam and focusing the beam toward the workpiece;
disposed between the beam source and the collimating lens, first and second optical elements for receiving the radiation beam and altering the spatial power distribution thereof;
a lens manipulation system for changing at least one of (i) a position of the first optical element within a path of the radiation beam, (ii) a position of the second optical element within the path of the radiation beam, or (iii) a distance between the first and second optical elements; and
a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece, wherein:
the first optical element comprises a lens having (i) a first surface that is substantially planar, and (ii) opposite the first surface, a second surface having (a) a first portion that is convexly curved and (b) a second portion that is substantially planar; and
the second optical element comprises a lens having (i) a first surface that is substantially planar, and (ii) opposite the first surface, a second surface having (a) a first portion that is concavely curved and (b) a second portion that is substantially planar.
34. The system of claim 33 , wherein the lens manipulation system is configured to fixedly position at least one of the first optical element or the second optical element transversely off-center within the path of the radiation beam.
35. The system of claim 33 , wherein the lens manipulation system is configured to change the distance between the first and second optical elements within the range of approximately 0 mm to approximately 20 mm.
36. The system of claim 33 , wherein the beam source comprises:
a beam emitter emitting a plurality of discrete beams;
focusing optics for focusing the plurality of beams onto a dispersive element;
a dispersive element for receiving and dispersing the received focused beams; and
a partially reflective output coupler positioned to receive the dispersed beams, transmit a portion of the dispersed beams therethrough as the radiation beam, and reflect a second portion of the dispersed beams back toward the dispersive element,
wherein the radiation beam is composed of multiple wavelengths.
37. The system of claim 36 , wherein the dispersive element comprises a diffraction grating.
38. The system of claim 33 , wherein the lens manipulation system is configured to change the distance between the first and second optical elements within the range of approximately 2 mm to approximately 50 mm.
39. The system of claim 33 , wherein at least one of the first optical element or the second optical element comprises at least one of fused silica or zinc sulfide.
40. The system of claim 33 , wherein the controller is configured to control the lens manipulation system based on one or properties of the workpiece.
41. The system of claim 40 , wherein the one or more properties of the workpiece comprise at least one of a distance to the workpiece, a composition of the workpiece, or a topography of the workpiece.