Display device
View Patent ↗Even when a light shielding film is provided between a transistor and a substrate, a threshold voltage of the transistor can be prevented or suppressed from being shifted. A display device includes light shielding films provided between a substrate and a semiconductor layer of a transistor including a gate electrode and the semiconductor layer. The semiconductor layer includes a source region and a drain region. Both of the light shielding films overlap the semiconductor layer when seen in a plan view, and are spaced apart from each other in a direction.
1. A display device comprising:
a transparent substrate including a first region and a second region provided outside the first region;
a plurality of pixels provided in the first region in the transparent substrate;
a thin film transistor provided in the second region in the transparent substrate; and
a first light shielding film provided between the thin film transistor and the transparent substrate,
wherein the thin film transistor includes:
a semiconductor layer formed above the second region in the transparent substrate; and
a first gate electrode and a second gate electrode formed above or below the semiconductor layer via a gate insulating film,
the first gate electrode and the second gate electrode are spaced apart from each other when seen in a plan view,
the semiconductor layer includes:
a source region formed in a first portion of the semiconductor layer which is positioned on an opposite side to the second gate electrode across the first gate electrode when seen in a plan view; and
a drain region formed in a second portion of the semiconductor layer which is positioned on an opposite side to the first gate electrode across the second gate electrode when seen in a plan view,
the first light shielding film overlaps the semiconductor layer and overlaps the first gate electrode or the second gate electrode when seen in a plan view, and
any one of a first end of the first gate electrode which is on the source region side, a second end of the first gate electrode which is on the drain region side, a third end of the second gate electrode which is on the source region side, and a fourth end of the second gate electrode which is on the drain region side is not arranged on the first light shielding film.
2. The display device according to claim 1 , comprising
a second light shielding film provided between the thin film transistor and the second region in the transparent substrate,
wherein the first light shielding film overlaps the first gate electrode but not overlap the second gate electrode,
the second light shielding film overlaps the second gate electrode but not overlap the first gate electrode,
the first end of the first gate electrode is arranged on the first light shielding film,
the second end of the first gate electrode is not arranged on the first light shielding film,
the third end of the second gate electrode is not arranged on the second light shielding film, and
the fourth end of the second gate electrode is arranged on the second light shielding film.
3. The display device according to claim 1 ,
wherein a fifth end of the first light shielding film which is on the source region side is arranged below the first gate electrode, and
a sixth end of the first light shielding film which is on the drain region side is arranged below the second gate electrode.
4. The display device according to claim 2 ,
wherein the semiconductor layer includes:
a first semiconductor region formed in a third portion of the semiconductor layer which is positioned between the first gate electrode and the source region when seen in a plan view; and
a second semiconductor region formed in a fourth portion of the semiconductor layer which is positioned between the second gate electrode and the drain region when seen in a plan view,
the source region is formed by introducing impurities of a first conductivity type into the first portion of the semiconductor layer,
the drain region is formed by introducing impurities of a first conductivity type into the second portion of the semiconductor layer,
the first semiconductor region is formed by introducing the impurities of the first conductivity type into the third portion of the semiconductor layer,
the second semiconductor region is formed by introducing the impurities of the first conductivity type into the fourth portion of the semiconductor layer,
a concentration of the impurities of the first conductivity type in the first semiconductor region is lower than a concentration of the impurities of the first conductivity type in the source region, and
a concentration of the impurities of the first conductivity type in the second semiconductor region is lower than a concentration of the impurities of the first conductivity type in the drain region.
5. The display device according to claim 4 ,
wherein the first semiconductor region is arranged in a region where the first light shielding film is formed when seen in a plan view, and
the second semiconductor region is arranged in a region where the second light shielding film is formed when seen in a plan view.
6. The display device according to claim 2 ,
wherein each of the first light shielding film and the second light shielding film is formed of a metal film or an alloy film.
7. The display device according to claim 6 ,
wherein each of the first light shielding film and the second light shielding film is in an electrically floating state.