MAGNETIC RECORDING HEAD TEST FIXTURE HAVING WRAP-AROUND CONTACT PADS
A test fixture for testing magnetic heads to be used in a magnetic data recording system. The test fixture includes a test fixture body that includes lead terminals. The lead terminals, which can be constructed of Si have a top surface and first and second laterally opposed sides. An electrically conductive material is formed over the lead terminal and extends down the sides of the lead terminal. Extending the lead terminal down the sides of the lead terminal as well as over the top surface provides improved adhesion of the electrically conductive lead material to the lead terminal. This improved adhesion is especially beneficial for use in such a test fixture, because the test fixture is designed to flex during use, which would otherwise contribute to de-lamination of the electrically conductive lead material from the lead terminal.
1 . A test fixture, comprising:
a terminal structure having first and second laterally opposed sides and a top surface extending from the first side to the second side; and
an electrically conductive lead material formed over the top surface of the terminal structure and extending down each of the first and second sides.
2 . The test fixture as in claim 1 , wherein the terminal structure comprises Si.
3 . The test fixture as in claim 1 , further comprising an electrically conductive seed layer located between the terminal structure and the electrically conductive lead material.
4 . The test fixture as in claim 1 , wherein the electrically conductive lead material comprises Au.
5 . The test fixture as in claim 1 , wherein the electrically conductive lead material extends about halfway down each of the sides of the terminal structure.
6 . The test fixture as in claim 1 , wherein the electrically conductive lead material extends ⅓ to ⅔ of the way down each of the sides of the terminal structure.
7 . The test fixture as in claim 1 , wherein the terminal structure further comprises an end surface and wherein the electrically conductive lead material extends down the end surface of the terminal structure.
8 . The test fixture as in claim 1 , wherein the terminal structure further comprises first and second end surfaces, and wherein:
the electrically conductive lead material extends down each of the first and second end surfaces, and
the electrically conductive lead material extends further down the first end surface than it does down the second end surface.
9 . The test fixture as in claim 8 , wherein the electrically conductive lead material extends about half way down the second end surface and at least ⅔ down the first end surface.
10 . The test fixture as in claim 1 , wherein the test fixture is configured to hold a slider and temporarily electrically connect the slider with a suspension assembly.
11 . A method of manufacturing a test fixture, comprising:
providing a substrate;
forming a fixture body over the substrate, the fixture body including a lead terminal portion having a top surface and first and second laterally opposed sides;
depositing an electrically conductive seed layer;
depositing a photoresist over the electrically conductive seed layer;
exposing and developing the photoresist to reduce the thickness of the photoresist in a region of the lead terminal; and
electroplating an electrically conductive material.
12 . The method as in claim 11 , wherein the exposing and developing the photoresist exposes the electrically conductive seed layer on the lead terminal.
13 . The method as in claim 11 , further comprising, after electroplating the electrically conductive lead material, removing the photoresist.
14 . The method as in claim 11 , wherein the exposing and developing of the photoresist only reduces the thickness of the photoresist in the region of the lead terminal portion.
15 . The method as in claim 11 , wherein the exposing and developing of the photoresist exposes the electrically conductive seed layer only in the region of the lead terminal portion.
16 . The method as in claim 11 , wherein the exposing and developing of the photoresist reduces the thickness of the photoresist in the region of the lead terminal to a thickness that is about half the thickness of the lead terminal portion.
17 . The method as in claim 11 , wherein the test fixture body comprises Si.
18 . The method as in claim 11 , wherein the forming of the test fixture further comprises:
depositing an etch stop layer over the substrate;
depositing a test fixture material over the substrate;
photolithographically patterning a mask structure over the test fixture material; and
performing an etching process to remove portions of the test fixture material that are not protected by the mask structure.
19 . The method as in claim 18 , wherein the test fixture material comprises Si.
20 . The method as in claim 11 , further comprising:
after electroplating the electrically conductive material, removing the photoresist; and
removing portions of the seed material that are not protected by the electrically conductive material.