VAPOR DEPOSITION APPARATUS AND METHOD
A vapor deposition apparatus includes a chamber configured to operate at vacuum and at least one crucible in the chamber. The crucible is configured to receive an ingot, a feeder operable to move the ingot with respect to the at least one crucible, and a heater in the chamber and configured to heat a hot zone between the at least one crucible and the feeder. A method for vapor deposition is also disclosed.
1 . A vapor deposition apparatus, comprising:
a chamber configured to operate at vacuum;
at least one crucible in the chamber, the at least one crucible configured to receive an ingot;
a feeder operable to move the ingot with respect to the at least one crucible; and
a heater in the chamber and configured to heat a hot zone between the at least one crucible and the feeder.
2 . The apparatus of claim 1 , wherein the feeder includes a drive mechanism and a mechanical guide mechanism or guide rods.
3 . The apparatus of claim 2 , wherein the heater is between the mechanical guide mechanism or guide rods and the crucible.
4 . The apparatus of claim 1 , wherein the heater is fixed to the crucible.
5 . The apparatus of claim 1 , wherein the heater is an induction heater.
6 . The apparatus of claim 1 , wherein the heater is a microwave heater.
7 . The apparatus of claim 1 , wherein the heater is a resistance heater.
8 . The apparatus of claim 1 , wherein the heater is selected from a group consisting of an induction heater, a microwave heater, and a resistance heater.
9 . The apparatus of claim 1 , wherein the heater circumscribes the hot zone.
10 . The apparatus of claim 1 , wherein the heater is operable to heat the hot zone above the vaporization temperature of water across a typical range of thermal emission physical vapor deposition (TE-PVD) process pressures.
11 . The apparatus of claim 1 , further comprising heat shields defining the hot zone.
12 . A method for vapor deposition, comprising:
driving off moisture from an ingot in a vapor deposition chamber prior to the ingot entering a crucible; and
providing the ingot to the crucible for vapor deposition.
13 . The method of claim 12 , further comprising feeding the ingot through a hot zone and into the crucible.
14 . The method of claim 13 , wherein the hot zone is defined between an ingot feeder and the crucible.
15 . The method of claim 13 , wherein the moisture is driven off as the ingot is fed through the hot zone.
16 . The method of claim 13 , wherein heat is retained by providing heat shields.
17 . The method of claim 13 , further comprising heating the hot zone with a heater that is in the chamber.
18 . The method of claim 17 , wherein the heater is selected from a group consisting of an induction heater, a microwave heater, and a resistance heater.
19 . The method of claim 18 , wherein the ingot is heated to a temperature above the vaporization temperature of water.
20 . The method of claim 17 , wherein the heater circumscribes the ingot.