Nanostructured devices for detecting and analyzing biomolecules
A biosensing FET device, comprising a plurality of nanostructured SOI channels, that is adapted to operate in solutions having a high ionic strength and provides improves sensitivity and detection. Generally, the biosensing device comprises an underlying substrate layer, an insulator and a semiconductor layer and a plurality of channels in the semiconductor layer comprising a plurality of whole or partially formed nanopores in the channels.
1. A method of making a biosensing device comprising:
(a) providing an underlying substrate layer;
(b) disposing an insulator on the substrate;
(c) disposing a semiconductor, having an exposed surface with one or more channels, on the insulator layer;
(d) forming one or more nanopores in one or more of the channels; and
(e) functionalizing the one or more nanopores with a biomolecule binder.
2. The method of claim 1 , wherein the channels have a density of nanopores between 10 10 to 10 12 per cm 2 .
3. The method of claim 1 , wherein the nanopores are formed in the channels to achieve a density of nanopores between 4×10 10 to 2×10 11 per cm 2 and wherein the nanopores have a pitch between 20 nm to 50 nm.
4. The method according to claim 1 , wherein one or more of the channels has a height and one or more of the nanopores has a depth that is less than the height of one or more of the channels.
5. The method of claim 3 , wherein the nanopores are formed by nanopatterning.
6. The method of claim 1 , wherein the nanopores are formed by block copolymer lithography.
7. The method of claim 6 , wherein the block copolymer lithography comprises,
(a) coating the semiconductor with a block copolymer capable of phase separating;
(b) providing stimulus to form phase separated block copolymer;
(c) etching said semiconductor layer to form one or more nanopores; and
(d) removing at least a portion of the phase separated block copolymer.
8. The method of claim 7 , wherein the block copolymer comprises one or both of polystyrene-block-polybutadiene and polystyrene-block-polyisoprene.
9. The method of claim 3 , wherein one or more of the channels has a height and one or more of the nanopores has a depth that is equal to or greater than the height of one or more of the channels, so that the nanopores extend through the semiconductor layer and into the insulator layer.
10. The method of claim 3 , further comprising silanizing one or more of the nanopores.
11. The method of claim 1 , wherein the biosensing device is a field effect transistor (FET) device.
12. The method of claim 11 , wherein the FET device includes a source electrode and a drain electrode.