IP Library Granted Patent US 9,806,125
Granted Patent B2
US 9,806,125 · App. 15/215,085 · Granted Oct 31, 2017

Compositionally graded photodetectors

Inventors: Rhonda R. Willigan (Manchester, CT); Jose L. Santana (Vernon, CT); Marcin Piech (East Hampton, CT)
Assignee: Carrier Corporation
H01L27/14685H01L21/0251H01L21/02472H01L21/02483H01L21/02505H01L21/02554H01L21/02565H01L21/02628H01L27/1462H01L27/14636H01L31/02966H01L31/09H01L31/1832
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Quick Facts
Patent No.
US 9,806,125
App. No.
15/215,085
Granted
Oct 31, 2017
Kind
B2
Abstract

An ultraviolet photodetector for a sensor device includes a film deposited on a substrate. The film includes a compositionally graded magnesium-zinc oxide having a ratio of magnesium-to-zinc that decreases between a portion of the film adjacent to the substrate and a portion of the film opposite the substrate for shifting the peak absorption of the film toward the visible wavelengths of the electromagnetic spectrum.

Claims (33)

1. An ultraviolet (UV) photodetector, comprising:

a substrate;

an electrode coupled to the substrate; and

a compositionally graded magnesium-zinc oxide film deposited on the substrate and connected to the electrode, wherein the film comprises:

a base layer with a Mg x Zn (1-x) O composition overlaying the substrate;

one or more intermediate layers with a Mg y Zn (1-y) O composition overlaying the base layer; and

an incident layer with a Mg z Zn (1-z) O composition overlaying the intermediate layer, wherein x is greater than y, and wherein y is greater than z, the film having a zinc content that increases from a portion of the film adjacent the substrate to a portion of the film opposite the substrate to red shift the peak absorption of the film.

2. The UV photodetector as recited in claim 1 , wherein the film includes a plurality of layers deposited on the substrate, each succeeding layer having a zinc content that is greater than each preceding layers interposed between the succeeding layer and the substrate.

3. The UV photodetector as recited in claim 1 , wherein the film includes a plurality of layers deposited on the substrate, each succeeding layer having a magnesium content that is less than each of the preceding layers interposed between the succeeding layer and the substrate.

4. The UV photodetector as recited in claim 1 , wherein the film comprises a plurality of layers having a cubic crystalline structure.

5. The UV photodetector as recited in claim 1 , wherein the film has a thickness of between about 175 nanometers and about 350 nanometers.

6. The UV photodetector as recited in claim 1 , wherein the film comprises a plurality of layers each having a thickness of between about twenty-five (25) nanometers and about fifty (50) nanometers.

7. The UV photodetector as recited in claim 1 , wherein the film includes a base layer having magnesium-zinc oxide composition according to about Mg 0.80 Zn 0.20 O.

8. The UV photodetector as recited in claim 1 , wherein the film includes an incident layer having a magnesium-zinc oxide composition with a magnesium to zinc ratio that is between 0.5 to 0.5 and 0.65 to 0.35.

9. The UV photodetector as recited in claim 1 , wherein the film includes at least one intermediate layer overlaying the base layer and having less magnesium than the base layer.

10. The UV photodetector as recited in claim 1 , wherein the film comprises seven layers overlaying the substrate, wherein magnesium content decreases stepwise from a first layer adjacent the substrate through the seventh layer.

11. The UV photodetector as recited in claim 1 , wherein the film has a peak absorption that is between about 220 nanometers and about 280 nanometers.

12. An ultraviolet (UV) photodetector, comprising:

a substrate;

an electrode coupled to the substrate; and

a compositionally graded magnesium-zinc oxide film deposited on the substrate and connected to the electrode,

wherein the film comprises three or more layers overlaying the substrate and zinc content increases stepwise from a first layer adjacent the substrate through an incident layer, and

wherein the film has a zinc content that increases from a portion of the film adjacent the substrate to a portion of the film opposite the substrate to red shift the peak absorption of the film.

13. The UV photodetector as recited in claim 12 , wherein each of the three or more layers have a zinc content that is greater than each preceding layers interposed between the succeeding layer and the substrate.

14. The UV photodetector as recited in claim 12 , wherein each of the three or more layers has a magnesium content that is less than each of the preceding layers interposed between the succeeding layer and the substrate.

15. The UV photodetector as recited in claim 12 , wherein each of the three or more layers has a cubic crystalline structure.

16. The UV photodetector as recited in claim 12 , wherein the film has a thickness of between about 175 nanometers and about 350 nanometers.

17. The UV photodetector as recited in claim 12 , wherein each of the three or more layers has a thickness of between about twenty-five (25) nanometers and about fifty (50) nanometers.

18. The UV photodetector as recited in claim 12 , wherein the film includes a base layer having magnesium-zinc oxide composition according to about Mg 0.80 Zn 0.20 O.

19. The UV photodetector as recited in claim 12 , wherein the film includes an incident layer having a magnesium-zinc oxide composition with a magnesium to zinc ratio that is between 0.5 to 0.5 and 0.65 to 0.35.

20. The UV photodetector as recited in claim 12 , wherein the film includes at least one intermediate layer overlaying the base layer and having less magnesium than the base layer.

21. The UV photodetector as recited in claim 12 , wherein the film comprises seven layers overlaying the substrate, wherein magnesium content decreases stepwise from a first layer adjacent the substrate through the seventh layer.

22. The UV photodetector as recited in claim 12 , wherein the film has a peak absorption that is between about 220 nanometers and about 280 nanometers.

Assignments (2)
SECURITY INTEREST Recorded Jul 1, 2024
From: DETECTOR ELECTRONICS, LLC (F/K/A DETECTOR ELECTRONICS CORPORATION); FIREYE, LLC (F/K/A FIREYE INC.); DETECTOR ELECTRONICS BUYER US, LLC; FIREYE BUYER, LLC
To: ALTER DOMUS (US) LLC, AS AGENT
Reel/Frame 068102/0675 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 27, 2017
From: WILLIGAN, RHONDA R.; SANTANA, JOSE L.; PIECH, MARCIN
To: CARRIER CORPORATION
Reel/Frame 041378/0734 →
Continuity (2)
Provisional Application 62198033 · Jul 28, 2015
Related Publication 20170033150A1 · Feb 2, 2017